Homoepitaxial growth of AlN layers using by metalorganic vapor phase epitaxy on freestanding AlN substrate

2014 ◽  
Author(s):  
Tomohiro Morishita ◽  
Motoaki Iwaya ◽  
Tetsuya Takeuchi ◽  
Satoshi Kamiyama ◽  
Isamu Akasaki
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Homoepitaxial Growth

Homoepitaxial Growth of ZnO by Metalorganic Vapor Phase Epitaxy

2002 ◽  
Vol 229 (2) ◽  
pp. 915-919 ◽  
Author(s):  
K. Ogata ◽  
T. Kawanishi ◽  
K. Sakurai ◽  
S.-W. Kim ◽  
K. Maejima ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Homoepitaxial Growth

Homoepitaxial growth of AlN layers on freestanding AlN substrate by metalorganic vapor phase epitaxy

2014 ◽  
Vol 390 ◽  
pp. 46-50 ◽  
Author(s):  
Tomohiro Morishita ◽  
Motoaki Iwaya ◽  
Tetsuya Takeuchi ◽  
Satoshi Kamiyama ◽  
Isamu Akasaki
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Homoepitaxial Growth

Effect of high temperature homoepitaxial growth of β-Ga2O3 by hot-wall metalorganic vapor phase epitaxy

2022 ◽  
pp. 126520
Author(s):  
Kazutada Ikenaga ◽  
Nami Tanaka ◽  
Taro Nishimura ◽  
Hirotaka Iino ◽  
Ken Goto ◽  
...  
Keyword(s):  
High Temperature ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Homoepitaxial Growth

Homoepitaxial growth of ZnO by metalorganic vapor phase epitaxy in two-dimensional growth mode

2007 ◽  
Vol 308 (1) ◽  
pp. 170-175 ◽  
Author(s):  
S. Heinze ◽  
A. Krtschil ◽  
J. Bläsing ◽  
T. Hempel ◽  
P. Veit ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Growth Mode ◽  
Two Dimensional ◽  
Homoepitaxial Growth ◽  
Dimensional Growth

Homoepitaxial growth of GaN by metalorganic vapor phase epitaxy: A benchmark for GaN technology

1999 ◽  
Vol 75 (8) ◽  
pp. 1098-1100 ◽  
Author(s):  
C. Kirchner ◽  
V. Schwegler ◽  
F. Eberhard ◽  
M. Kamp ◽  
K. J. Ebeling ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Homoepitaxial Growth
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