Focus adjustable motion-blur compensation method using deformable mirror

2019 ◽  
Author(s):  
Tomohiko Hayakawa ◽  
Kenichi Murakami ◽  
Jerome Pitogo de Leon ◽  
Masatoshi Ishikawa
Keyword(s):  
Motion Blur ◽  
Compensation Method ◽  
Deformable Mirror

Large-aperture deformable mirror correction of tiled-grating wavefront error

2006 ◽  
Vol 133 ◽  
pp. 645-648 ◽  
Author(s):  
B. E. Kruschwitz ◽  
R. Jungquist ◽  
J. Qiao ◽  
S. Abbey ◽  
S. E. Dean ◽  
...  
Keyword(s):  
Deformable Mirror ◽  
Large Aperture ◽  
Wavefront Error

Current Reduction Method for Dual Active Bridge Converter in Non-linear Dead-time Compensation Method

2020 ◽  
Vol 140 (3) ◽  
pp. 175-183
Author(s):  
Kengo Kawauchi ◽  
Hayato Higa ◽  
Hiroki Watanabe ◽  
Keisuke Kusaka ◽  
Jun-ichi Itoh
Keyword(s):  
Reduction Method ◽  
Dead Time ◽  
Compensation Method ◽  
Dual Active Bridge ◽  
Non Linear ◽  
Dead Time Compensation ◽  
Current Reduction

Study and manufacture of a novel micro-deformable mirror

2003 ◽  
Author(s):  
Hongbin Yu ◽  
Haiqing Chen ◽  
Zimin Zhu ◽  
Chao Wang ◽  
Dacheng Zhang ◽  
...  
Keyword(s):  
Deformable Mirror

Correcting for Spherical Aberrations in Solid Immersion Microscopy Using a Deformable Mirror

2011 ◽  
Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Error Correction ◽  
Deformable Mirror ◽  
Wafer Thickness ◽  
Wavefront Error ◽  
Substrate Wafer ◽  
Thickness Error

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.

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