Shape Sensing Method for Micro Fabricated Objects based on Real-time High-speed Motion Blur Compensation Method using Galvanometer Mirror

Author(s):  
Kenichi MURAKAMI ◽  
Tomohiko HAYAKAWA ◽  
DE LEON Jerome Pitogo ◽  
Masatoshi ISHIKAWA
2016 ◽  
Author(s):  
Katherine J. Dobson ◽  
Sophia B. Coban ◽  
Sam A. McDonald ◽  
Joanna Walsh ◽  
Robert Atwood ◽  
...  

Abstract. A variable volume flow cell has been integrated with state-of-the-art ultra-high speed synchrotron x-ray tomography imaging. The combination allows the first real time (sub-second) capture of dynamic pore (micron) scale fluid transport processes in 4D (3D + time). With 3D data volumes acquired at up to 20 Hz, we perform in situ experiments that capture high frequency pore-scale dynamics in 5–25 mm diameter samples with voxel (3D equivalent of a pixel) resolution of 2.5 to 3.8 µm. The data are free from motion artefacts, can be spatially registered or collected in the same orientation making them suitable for detailed quantitative analysis of the dynamic fluid distribution pathways and processes. The method presented here are capable of capturing a wide range of high frequency non equilibrium pore-scale processed including wetting, dilution, mixing and reaction phenomena, without sacrificing significant spatial resolution. As well as fast streaming (continuous acquisition) at 20 Hz, it also allows larger-scale and longer term experimental runs to be sampled intermittently at lower frequency (time-lapse imaging); benefiting from fast image acquisition rates to prevent motion blur in highly dynamic systems. This marks a major technical breakthrough for quantification of high frequency pore scale processes: processes that are critical for developing and validating more accurate multiscale flow models through spatially and temporally heterogeneous pore networks.


Solid Earth ◽  
2016 ◽  
Vol 7 (4) ◽  
pp. 1059-1073 ◽  
Author(s):  
Katherine J. Dobson ◽  
Sophia B. Coban ◽  
Samuel A. McDonald ◽  
Joanna N. Walsh ◽  
Robert C. Atwood ◽  
...  

Abstract. A variable volume flow cell has been integrated with state-of-the-art ultra-high-speed synchrotron X-ray tomography imaging. The combination allows the first real-time (sub-second) capture of dynamic pore (micron)-scale fluid transport processes in 4-D (3-D + time). With 3-D data volumes acquired at up to 20 Hz, we perform in situ experiments that capture high-frequency pore-scale dynamics in 5–25 mm diameter samples with voxel (3-D equivalent of a pixel) resolutions of 2.5 to 3.8 µm. The data are free from motion artefacts and can be spatially registered or collected in the same orientation, making them suitable for detailed quantitative analysis of the dynamic fluid distribution pathways and processes. The methods presented here are capable of capturing a wide range of high-frequency nonequilibrium pore-scale processes including wetting, dilution, mixing, and reaction phenomena, without sacrificing significant spatial resolution. As well as fast streaming (continuous acquisition) at 20 Hz, they also allow larger-scale and longer-term experimental runs to be sampled intermittently at lower frequency (time-lapse imaging), benefiting from fast image acquisition rates to prevent motion blur in highly dynamic systems. This marks a major technical breakthrough for quantification of high-frequency pore-scale processes: processes that are critical for developing and validating more accurate multiscale flow models through spatially and temporally heterogeneous pore networks.


2015 ◽  
Vol 23 (25) ◽  
pp. 31648 ◽  
Author(s):  
Tomohiko Hayakawa ◽  
Takanoshin Watanabe ◽  
Masatoshi Ishikawa

1995 ◽  
Author(s):  
Rod Clark ◽  
John Karpinsky ◽  
Gregg Borek ◽  
Eric Johnson
Keyword(s):  

Author(s):  
Kenneth Krieg ◽  
Richard Qi ◽  
Douglas Thomson ◽  
Greg Bridges

Abstract A contact probing system for surface imaging and real-time signal measurement of deep sub-micron integrated circuits is discussed. The probe fits on a standard probe-station and utilizes a conductive atomic force microscope tip to rapidly measure the surface topography and acquire real-time highfrequency signals from features as small as 0.18 micron. The micromachined probe structure minimizes parasitic coupling and the probe achieves a bandwidth greater than 3 GHz, with a capacitive loading of less than 120 fF. High-resolution images of submicron structures and waveforms acquired from high-speed devices are presented.


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