Nano-scale molecular analysis of photo-resist films with massive cluster secondary ion mass spectrometry

2019 ◽  
Author(s):  
Michael J. Eller ◽  
Mingqi Li ◽  
Xisen Hou ◽  
Stanislav V. Verkhoturov ◽  
Emile A. Schweikert ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Molecular Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Nano Scale ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Massive Cluster

Nanoscale molecular analysis of photoresist films with massive cluster secondary-ion mass spectrometry

2019 ◽  
Vol 18 (02) ◽  
pp. 1 ◽  
Author(s):  
Michael J. Eller ◽  
Mingqi Li ◽  
Xisen Hou ◽  
Stanislav V. Verkhoturov ◽  
Emile A. Schweikert ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Molecular Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Massive Cluster

Testing Molecular Homogeneity at the Nanoscale with Massive Cluster Secondary Ion Mass Spectrometry

2016 ◽  
Vol 88 (15) ◽  
pp. 7639-7646 ◽  
Author(s):  
Michael J. Eller ◽  
Stanislav V. Verkhoturov ◽  
Emile A. Schweikert
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Massive Cluster

Understanding photoacid generator distribution at the nanoscale using massive cluster secondary ion mass spectrometry

2019 ◽  
Vol 18 (03) ◽  
pp. 1
Author(s):  
Xisen Hou ◽  
Mingqi Li ◽  
Michael J. Eller ◽  
Stanislav V. Verkhoturov ◽  
Emile A. Schweikert ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Photoacid Generator ◽  
Massive Cluster

Understanding the fate and linkage of N and S in earthworm-engineered peat soil by coupling stable isotopes and nano-scale secondary ion mass spectrometry

2012 ◽  
Vol 112 (1-3) ◽  
pp. 165-177 ◽  
Author(s):  
Aurélien Gicquel ◽  
André-Jean Francez ◽  
Thomas Delhaye ◽  
Gérard Gruau ◽  
Vincent Hallaire ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Stable Isotopes ◽  
Secondary Ion Mass Spectrometry ◽  
Peat Soil ◽  
Nano Scale ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Static secondary ion mass spectrometry for organic and inorganic molecular analysis in solids

2003 ◽  
Vol 500 (1-2) ◽  
pp. 259-278 ◽  
Author(s):  
Rita Van Ham ◽  
Luc Van Vaeck ◽  
Annemie Adriaens ◽  
Freddy Adams
Keyword(s):  
Mass Spectrometry ◽  
Molecular Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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