Precision interferometric thickness measurement of optical flat using wavelength tuning Fizeau interferometer

Photonic Instrumentation Engineering VII ◽

10.1117/12.2544324 ◽

2020 ◽

Author(s):

Yangjin Kim ◽

Jiwon Seo ◽

Sungtae Kim ◽

Wonjun `. Bae ◽

Mamoru Mitsuishi

Keyword(s):

Thickness Measurement ◽

Wavelength Tuning ◽

Fizeau Interferometer

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Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer

Optics Express ◽

10.1364/oe.23.004065 ◽

2015 ◽

Vol 23 (4) ◽

pp. 4065 ◽

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Thickness Measurement ◽

Wavelength Tuning ◽

Fizeau Interferometer ◽

Transparent Plate ◽

Fraction Method

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Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2013.04.003 ◽

2013 ◽

Vol 51 (10) ◽

pp. 1173-1178 ◽

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Glass Plate ◽

Thickness Measurement ◽

Wavelength Tuning ◽

Fraction Method

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Simultaneous measurement of the surface shape and thickness for an optical flat with a wavelength-tuning Fizeau interferometer with suppression of drift error

Applied Optics ◽

10.1364/ao.379718 ◽

2020 ◽

Vol 59 (4) ◽

pp. 991

Author(s):

Yangjin Kim ◽

Younghoon Moon ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Simultaneous Measurement ◽

Wavelength Tuning ◽

Surface Shape ◽

Fizeau Interferometer

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Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2016.06.021 ◽

2016 ◽

Vol 86 ◽

pp. 309-316 ◽

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Phase Shifting ◽

Wavelength Tuning ◽

Surface Shape ◽

Shape Measurement ◽

Fizeau Interferometer ◽

Transparent Plate

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Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer

10.1117/12.2061476 ◽

2014 ◽

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Wavelength Tuning ◽

Window Function ◽

Phase Extraction ◽

Fizeau Interferometer ◽

Extraction Algorithm

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Phase-measuring algorithm to suppress inner reflection of transparent parallel plate in wavelength tuning Fizeau interferometer

Precision Engineering ◽

10.1016/j.precisioneng.2016.11.006 ◽

2017 ◽

Vol 48 ◽

pp. 67-74 ◽

Author(s):

Yangjin Kim ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Parallel Plate ◽

Wavelength Tuning ◽

Fizeau Interferometer

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Phase extraction formula for glass thickness measurement using Fizeau interferometer

Journal of Mechanical Science and Technology ◽

10.1007/s12206-021-0325-6 ◽

2021 ◽

Author(s):

Wonjun Bae ◽

Yangjin Kim

Keyword(s):

Thickness Measurement ◽

Phase Extraction ◽

Fizeau Interferometer ◽

Glass Thickness

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Thickness measurement of transparent plate based on wavelength-tuning interferometry

Seventh International Conference on Optical and Photonic Engineering (icOPEN 2019) ◽

10.1117/12.2541959 ◽

2019 ◽

Author(s):

Qulei Xu ◽

Weiwei Zheng ◽

Tao Sun ◽

Yingjie Yu

Keyword(s):

Thickness Measurement ◽

Wavelength Tuning ◽

Transparent Plate

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Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function

Precision Engineering ◽

10.1016/j.precisioneng.2016.02.011 ◽

2016 ◽

Vol 45 ◽

pp. 187-194 ◽

Author(s):

Yangjin Kim ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Wavelength Tuning ◽

Surface Shape ◽

Window Function ◽

Fizeau Interferometer ◽

Reflective Surface

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Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII ◽

10.1117/12.2287641 ◽

2018 ◽

Author(s):

Yangjin Kim ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Simultaneous Measurement ◽

Parallel Plate ◽

Surface Profile ◽

Wavelength Tuning ◽

Thickness Variation ◽

Fizeau Interferometer

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