Thickness measurement of transparent plate based on wavelength-tuning interferometry

2019 ◽  
Author(s):  
Qulei Xu ◽  
Weiwei Zheng ◽  
Tao Sun ◽  
Yingjie Yu
Keyword(s):  
Thickness Measurement ◽  
Wavelength Tuning ◽  
Transparent Plate

Non-contact method of thickness measurement for a transparent plate using a laser auto-focus scanning probe

2019 ◽  
Vol 58 (35) ◽  
pp. 9524
Author(s):  
Quangsang Vo ◽  
Yiting Duan ◽  
Xiaodong Zhang ◽  
Fengzhou Fang
Keyword(s):  
Thickness Measurement ◽  
Scanning Probe ◽  
Contact Method ◽  
Transparent Plate ◽  
Auto Focus

High-accuracy thickness measurement of a transparent plate with the heterodyne central fringe identification technique

2011 ◽  
Vol 50 (21) ◽  
pp. 4011 ◽  
Author(s):  
Wang-Tsung Wu ◽  
Hung-Chih Hsieh ◽  
Wei-Yao Chang ◽  
Yen-Liang Chen ◽  
Der-Chin Su
Keyword(s):  
Thickness Measurement ◽  
High Accuracy ◽  
Transparent Plate ◽  
Identification Technique

Thickness Measurement in the AEM by Macintosh-Based Analysis of Two-Beam Convergent Beam Patterns

1990 ◽  
Vol 48 (2) ◽  
pp. 504-505
Author(s):  
John F. Mansfield ◽  
Douglas C. Crawford
Keyword(s):  
Electron Microscope ◽  
Video Camera ◽  
Thickness Measurement ◽  
Specimen Thickness ◽  
Crystalline Materials ◽  
Beam Dynamic ◽  
Line Measurement ◽  
On Line ◽  
Image Position ◽  
Convergent Beam

A method has been developed that allows on-line measurement of the thickness of crystalline materials in the analytical electron microscope. Two-beam convergent beam electron diffraction (CBED) patterns are digitized from a JEOL 2000FX electron microscope into an Apple Macintosh II microcomputer via a Gatan #673 CCD Video Camera and an Imaging Systems Technology Video 1000 frame-capture board. It is necessary to know the lattice parameters of the sample since measurements are made of the spacing of the diffraction discs in order to calibrate the pattern. The sample thickness is calculated from measurements of the spacings of the fringes that are seen in the diffraction discs. This technique was pioneered by Kelly et al, who used the two-beam dynamic theory of MacGillavry relate the deviation parameter (Si) of the ith fringe from the exact Bragg condition to the specimen thickness (t) with the equation:Where ξg, is the extinction distance for that reflection and ni is an integer.

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