Simultaneous measurement of the surface shape and thickness for an optical flat with a wavelength-tuning Fizeau interferometer with suppression of drift error

2020 ◽  
Vol 59 (4) ◽  
pp. 991
Author(s):  
Yangjin Kim ◽  
Younghoon Moon ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Simultaneous Measurement ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Fizeau Interferometer

scholarly journals Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function

2015 ◽  
Vol 23 (25) ◽  
pp. 32869 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Optical Thickness ◽  
Simultaneous Measurement ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function

scholarly journals Wide aperture piezoceramic deformable mirrors for aberration correction in high-power lasers

2016 ◽  
Vol 4 ◽  
Author(s):  
Vadim Samarkin ◽  
Alexander Alexandrov ◽  
Gilles Borsoni ◽  
Takahisa Jitsuno ◽  
Pavel Romanov ◽  
...  
Keyword(s):  
High Power ◽  
Surface Shape ◽  
Wavefront Sensor ◽  
Deformable Mirror ◽  
Deformable Mirrors ◽  
Aberration Correction ◽  
Response Functions ◽  
Fizeau Interferometer ◽  
High Power Lasers ◽  
Wide Aperture

The deformable mirror with the size of $410~\text{mm}\times 468~\text{mm}$ controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack–Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of $0.033~{\rm\mu}\text{m}$ (RMS). The possibility of correction of the aberrations in high-power lasers was numerically demonstrated.

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