scholarly journals Space-qualified Piezo Based Deformable Mirror for future Instruments with Active Optics

Author(s):  
Maximilian Freudling ◽  
Andreas Grzesik ◽  
Markus Erhard ◽  
Maximilian Gerhards ◽  
Sinje Leitz ◽  
...  
2011 ◽  
Author(s):  
Philseok Kim ◽  
Lauren D. Zarzar ◽  
Mughees Khan ◽  
Michael Aizenberg ◽  
Joanna Aizenberg

2019 ◽  
Vol 11 (4) ◽  
pp. 543-551
Author(s):  
David Alaluf ◽  
Bilal Mokrani ◽  
Kainan Wang ◽  
André Preumont

2012 ◽  
Author(s):  
Marie Laslandes ◽  
Claire Hourtoule ◽  
Emmanuel Hugot ◽  
Marc Ferrari ◽  
Céline Lopez ◽  
...  

2019 ◽  
Vol 27 (2) ◽  
pp. 404 ◽  
Author(s):  
Hairen Wang ◽  
Mingzhu Zhang ◽  
Yingxi Zuo ◽  
Xianzhong Zheng

2006 ◽  
Vol 133 ◽  
pp. 645-648 ◽  
Author(s):  
B. E. Kruschwitz ◽  
R. Jungquist ◽  
J. Qiao ◽  
S. Abbey ◽  
S. E. Dean ◽  
...  

Author(s):  
Hongbin Yu ◽  
Haiqing Chen ◽  
Zimin Zhu ◽  
Chao Wang ◽  
Dacheng Zhang ◽  
...  
Keyword(s):  

Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.


2020 ◽  
Vol 35 (11) ◽  
pp. 1110-1119
Author(s):  
Shuo CAO ◽  
◽  
Zhi-gao ZHANG ◽  
Zhi-yun ZHAO ◽  
Hu GU ◽  
...  

IEEE Access ◽  
2021 ◽  
Vol 9 ◽  
pp. 121645-121653
Author(s):  
Xiang Wei ◽  
Yongjun Yang ◽  
Dziki Mbemba ◽  
Feng Li ◽  
Zhizheng Wu ◽  
...  

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