3D surface topography measurement of diffractive optical element based on white light interferometry stitching method

2021 ◽  
Author(s):  
Wenwen Lu ◽  
shanyong chen ◽  
jingyang guo ◽  
xu wang ◽  
weiwei chen
Keyword(s):  
Surface Topography ◽  
White Light ◽  
Optical Element ◽  
Diffractive Optical Element ◽  
White Light Interferometry ◽  
3D Surface ◽  
3D Surface Topography

Similarity Evaluation of 3D Surface Topography Measurements

2021 ◽  
Author(s):  
Shaodong Wang ◽  
Xiao Zhang ◽  
Yi Zheng ◽  
Beiwen Li ◽  
Hantang Qin ◽  
...  
Keyword(s):  
Surface Topography ◽  
3D Surface ◽  
3D Surface Topography

High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

2018 ◽  
Vol 45 (6) ◽  
pp. 0604001
Author(s):  
邓钦元 Deng Qinyuan ◽  
唐燕 Tang Yan ◽  
周毅 Zhou Yi ◽  
杨勇 Yang Yong ◽  
胡松 Hu Song
Keyword(s):  
High Resolution ◽  
Frequency Domain ◽  
Surface Topography ◽  
White Light ◽  
Domain Analysis ◽  
Frequency Domain Analysis ◽  
White Light Interferometry

Leakage Monitoring in Static Sealing Interface Based on Three Dimensional Surface Topography Indicator

2018 ◽  
Vol 140 (10) ◽  
Author(s):  
Yiping Shao ◽  
Yaxiang Yin ◽  
Shichang Du ◽  
Tangbin Xia ◽  
Lifeng Xi
Keyword(s):  
Surface Topography ◽  
Three Dimensional ◽  
Machining Process ◽  
Void Volume ◽  
Engineering Practice ◽  
High Definition ◽  
Monitoring Method ◽  
3D Surface ◽  
3D Surface Topography ◽  
Leakage Monitoring

Leakage directly affects the functional behavior of a product in engineering practice, and surface topography is one of the main factors in static seal to prevent leakage. This paper aims at monitoring the leakage in static sealing interface, using three-dimensional (3D) surface topography as an indicator. The 3D surface is measured by a high definition metrology (HDM) instrument that can generate millions of data points representing the entire surface. The monitoring approach proposes a series of novel surface leakage parameters including virtual gasket, contact area percentage (CAP), void volume (VV), and relative void volume (SWvoid) as indicators. An individual control chart is adopted to monitor the leakage surface of the successive machining process. Meantime, based on the Persson contact mechanics and percolation theory, the threshold of leakage parameter is found using finite element modeling (FEM). Experimental results indicate that the proposed monitoring method is valid to precontrol the machining process and prevent leakage occurring.

Evaluation of the anisotropy of machined 3D surface topography

Wear ◽  
2000 ◽  
Vol 237 (2) ◽  
pp. 211-216 ◽  
Author(s):  
Cheng-Gui Li ◽  
Shen Dong ◽  
Guo-Xiong Zhang
Keyword(s):  
Surface Topography ◽  
3D Surface ◽  
3D Surface Topography

3D surface topography study of the biofunctionalized nanocrystalline Ti–6Zr–4Nb/Ca–P

2012 ◽  
Vol 70 ◽  
pp. 55-62 ◽  
Author(s):  
J. Jakubowicz ◽  
G. Adamek ◽  
M.U. Jurczyk ◽  
M. Jurczyk
Keyword(s):  
Surface Topography ◽  
3D Surface ◽  
3D Surface Topography
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