Leakage Monitoring in Static Sealing Interface Based on Three Dimensional Surface Topography Indicator

Leakage directly affects the functional behavior of a product in engineering practice, and surface topography is one of the main factors in static seal to prevent leakage. This paper aims at monitoring the leakage in static sealing interface, using three-dimensional (3D) surface topography as an indicator. The 3D surface is measured by a high definition metrology (HDM) instrument that can generate millions of data points representing the entire surface. The monitoring approach proposes a series of novel surface leakage parameters including virtual gasket, contact area percentage (CAP), void volume (VV), and relative void volume (SWvoid) as indicators. An individual control chart is adopted to monitor the leakage surface of the successive machining process. Meantime, based on the Persson contact mechanics and percolation theory, the threshold of leakage parameter is found using finite element modeling (FEM). Experimental results indicate that the proposed monitoring method is valid to precontrol the machining process and prevent leakage occurring.

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Measuring Surface Topography with Scanning Electron Microscopy. I. EZEImage: A Program to Obtain 3D Surface Data

Microscopy and Microanalysis ◽

10.1017/s1431927606060028 ◽

2005 ◽

Vol 12 (2) ◽

pp. 170-177 ◽

Cited By ~ 22

Author(s):

Ezequiel Ponz ◽

Juan Luis Ladaga ◽

Rita Dominga Bonetto

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Surface Topography ◽

Three Dimensional ◽

Sem Image ◽

3D Surface ◽

Surface Data ◽

3D Surface Topography ◽

Two Parameters ◽

Scanning Electron

Scanning electron microscopy (SEM) is widely used in the science of materials and different parameters were developed to characterize the surface roughness. In a previous work, we studied the surface topography with fractal dimension at low scale and two parameters at high scale by using the variogram, that is, variance vs. step log–log graph, of a SEM image. Those studies were carried out with the FERImage program, previously developed by us. To verify the previously accepted hypothesis by working with only an image, it is indispensable to have reliable three-dimensional (3D) surface data. In this work, a new program (EZEImage) to characterize 3D surface topography in SEM has been developed. It uses fast cross correlation and dynamic programming to obtain reliable dense height maps in a few seconds which can be displayed as an image where each gray level represents a height value. This image can be used for the FERImage program or any other software to obtain surface topography characteristics. EZEImage also generates anaglyph images as well as characterizes 3D surface topography by means of a parameter set to describe amplitude properties and three functional indices for characterizing bearing and fluid properties.

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Similarity Evaluation of 3D Surface Topography Measurements

Measurement Science and Technology ◽

10.1088/1361-6501/ac1b41 ◽

2021 ◽

Author(s):

Shaodong Wang ◽

Xiao Zhang ◽

Yi Zheng ◽

Beiwen Li ◽

Hantang Qin ◽

...

Keyword(s):

Surface Topography ◽

3D Surface ◽

3D Surface Topography

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A Large Measuring Range Profilometer for Three-Dimensional Surface Topography Measurement

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.364-366.750 ◽

2007 ◽

Vol 364-366 ◽

pp. 750-755 ◽

Cited By ~ 1

Author(s):

Xu Dong Yang ◽

Jia Chun Li ◽

Tie Bang Xie

Keyword(s):

Surface Topography ◽

Three Dimensional ◽

Displacement Sensor ◽

Resistance Force ◽

Sampling Point ◽

Measuring Range ◽

3D Surface Topography ◽

Control Circuits ◽

Industrial Control Computer ◽

Zero Offset

A novel profilometer for three-dimensional (3D) surface topography measurement is presented. The profilometer has large measuring range, high precision and small measuring touch force. It is composed of a two-dimensional (2D) displacement sensor, a 3D platform based on vertical scanning, measuring and control circuits and an industrial control computer. When a workpiece is measured, the vertical undulation of the profile at a sampling point leads to a zero offset of the 2D displacement sensor. According to the zero offset, a piezoelectric actuator and a servo motor drive the vertical scanning platform to move vertically to ensure that the lever returns to its balance position. So the non-linear error caused by the rotation of the lever is very small even if the measuring range is large. When the stylus barges up against a steep wall, the horizontal resistance force results in another zero offset of the 2D displacement sensor. If the zero offset exceeds a quota, the vertical scanning platform descends to make the stylus climb the steep wall successfully. According to the theoretical and experimental analysis, the profilometer can measure roughness, profile of sphere, step, groove and other 3D surfaces with curvature precisely.

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