Evaluation of the anisotropy of machined 3D surface topography

Wear ◽  
2000 ◽  
Vol 237 (2) ◽  
pp. 211-216 ◽  
Author(s):  
Cheng-Gui Li ◽  
Shen Dong ◽  
Guo-Xiong Zhang
Keyword(s):  
Surface Topography ◽  
3D Surface ◽  
3D Surface Topography

Similarity Evaluation of 3D Surface Topography Measurements

2021 ◽  
Author(s):  
Shaodong Wang ◽  
Xiao Zhang ◽  
Yi Zheng ◽  
Beiwen Li ◽  
Hantang Qin ◽  
...  
Keyword(s):  
Surface Topography ◽  
3D Surface ◽  
3D Surface Topography

Leakage Monitoring in Static Sealing Interface Based on Three Dimensional Surface Topography Indicator

2018 ◽  
Vol 140 (10) ◽  
Author(s):  
Yiping Shao ◽  
Yaxiang Yin ◽  
Shichang Du ◽  
Tangbin Xia ◽  
Lifeng Xi
Keyword(s):  
Surface Topography ◽  
Three Dimensional ◽  
Machining Process ◽  
Void Volume ◽  
Engineering Practice ◽  
High Definition ◽  
Monitoring Method ◽  
3D Surface ◽  
3D Surface Topography ◽  
Leakage Monitoring

Leakage directly affects the functional behavior of a product in engineering practice, and surface topography is one of the main factors in static seal to prevent leakage. This paper aims at monitoring the leakage in static sealing interface, using three-dimensional (3D) surface topography as an indicator. The 3D surface is measured by a high definition metrology (HDM) instrument that can generate millions of data points representing the entire surface. The monitoring approach proposes a series of novel surface leakage parameters including virtual gasket, contact area percentage (CAP), void volume (VV), and relative void volume (SWvoid) as indicators. An individual control chart is adopted to monitor the leakage surface of the successive machining process. Meantime, based on the Persson contact mechanics and percolation theory, the threshold of leakage parameter is found using finite element modeling (FEM). Experimental results indicate that the proposed monitoring method is valid to precontrol the machining process and prevent leakage occurring.

3D surface topography study of the biofunctionalized nanocrystalline Ti–6Zr–4Nb/Ca–P

2012 ◽  
Vol 70 ◽  
pp. 55-62 ◽  
Author(s):  
J. Jakubowicz ◽  
G. Adamek ◽  
M.U. Jurczyk ◽  
M. Jurczyk
Keyword(s):  
Surface Topography ◽  
3D Surface ◽  
3D Surface Topography

Novel Measurement Technique on 3D Surface Topography of Polishing Pad

2008 ◽  
Vol 53-54 ◽  
pp. 265-272
Author(s):  
Dong Ming Guo ◽  
N. Qin ◽  
Ren Ke Kang ◽  
Zhu Ji Jin
Keyword(s):  
Surface Topography ◽  
Chemical Mechanical Planarization ◽  
Sampling Interval ◽  
3D Measurement ◽  
Sampling Area ◽  
Polishing Pad ◽  
3D Surface ◽  
3D Surface Topography ◽  
Planarization Process ◽  
Polishing Pads

Among the properties of polishing pad, the surface roughness plays a crucial role in CMP (Chemical Mechanical Planarization) process. However, there is no acknowledged standard for measuring and characterizing the roughness of pad surface in 3D measurement. In this paper Talysurf CLI 2000 working on the principle of dynamic confocal measurement was initially suggested to measure the 3D surface topography of polishing pads through theoretical and experimental analysis. In addition, based on the Nyquist folding frequency and the statistical theory, a selection technique for sampling interval and sampling area was proposed and verified through experiments. The results showed that Talysurf CLI 2000 is more suitable than NewView to measure the 3D surface topography of polishing pads. 2μm sampling interval, 0.5×0.5mm2 sampling area and 10μm interval, 1×1mm2 area are respectively recommended for IC1000/SubaIV and SubaIV polishing pad.

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