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New double exposure technique without alternating phase-shift mask
Mapping Intimacies
◽
10.1117/12.711956
◽
2007
◽
Cited By ~ 1
Author(s):
Tomohiko Yamamoto
◽
Teruyoshi Yao
◽
Hiroki Futatsuya
◽
Tatsuo Chijimatsu
◽
Satoru Asai
Keyword(s):
Phase Shift
◽
Double Exposure
◽
Phase Shift Mask
◽
Exposure Technique
◽
Alternating Phase Shift Mask
Download Full-text
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Cited By
References
0.10 µm Dense Hole Pattern Formation by Double Exposure Utilizing Alternating Phase Shift Mask Using KrF Excimer Laser as Exposure Light
Japanese Journal of Applied Physics
◽
10.1143/jjap.38.2686
◽
1999
◽
Vol 38
(Part 1, No. 5A)
◽
pp. 2686-2693
◽
Cited By ~ 6
Author(s):
Shuji Nakao
◽
Akihiro Nakae
◽
Atsumi Yamaguchi
◽
Kouichirou Tsujita
◽
Wataru Wakamiya
Keyword(s):
Pattern Formation
◽
Phase Shift
◽
Excimer Laser
◽
Double Exposure
◽
Krf Excimer Laser
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
New graph bipartizations for double-exposure, bright field alternating phase-shift mask layout
Proceedings of the 2001 conference on Asia South Pacific design automation - ASP-DAC '01
◽
10.1145/370155.370304
◽
2001
◽
Cited By ~ 4
Author(s):
Andrew B. Kahng
◽
Shailesh Vaya
◽
Alexander Zelikovsky
Keyword(s):
Phase Shift
◽
Double Exposure
◽
Bright Field
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
New graph bipartizations for double-exposure, bright field alternating phase-shift mask layout
Proceedings of the ASP-DAC 2001. Asia and South Pacific Design Automation Conference 2001 (Cat. No.01EX455)
◽
10.1109/aspdac.2001.913293
◽
2002
◽
Cited By ~ 8
Author(s):
A.B. Kahng
◽
S. Vaya
◽
A. Zelikovsky
Keyword(s):
Phase Shift
◽
Double Exposure
◽
Bright Field
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Characterizing the process window of a double-exposure dark-field alternating phase-shift mask
10.1117/12.475680
◽
2002
◽
Author(s):
Chris A. Mack
Keyword(s):
Phase Shift
◽
Dark Field
◽
Process Window
◽
Double Exposure
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Preliminary study of 65 nm node alternating phase-shift mask fabrication
10.1117/12.467487
◽
2002
◽
Author(s):
Kouji Hosono
◽
Naoyuki Ishiwata
◽
Satoru Asai
◽
Hiroshi Maruyama
◽
Yutaka Miyahara
◽
...
Keyword(s):
Phase Shift
◽
Preliminary Study
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
◽
Mask Fabrication
Download Full-text
Application of alternating phase shift mask to device fabrication
10.1117/12.209281
◽
1995
◽
Cited By ~ 1
Author(s):
Sunggi Kim
◽
Sang-Gyun Woo
◽
Woo-Sung Han
◽
Young-Bum Koh
◽
Moon-Yong Lee
Keyword(s):
Phase Shift
◽
Device Fabrication
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Introduction of full-level alternating phase-shift mask technology into IC manufacturing
10.1117/12.474639
◽
2002
◽
Author(s):
Joerg Thiele
◽
Marco Ahrens
◽
Wolfgang Dettmann
◽
M. Heissmeier
◽
Mario Hennig
◽
...
Keyword(s):
Phase Shift
◽
Ic Manufacturing
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Highly selective dry etching of alternating phase-shift mask (PSM) structures for extreme ultraviolet lithography (EUVL) using inductively coupled plasmas (ICP)
Thin Solid Films
◽
10.1016/j.tsf.2009.01.119
◽
2009
◽
Vol 517
(14)
◽
pp. 3938-3941
Author(s):
H.Y. Jung
◽
Y.R. Park
◽
H.J. Lee
◽
N.-E. Lee
◽
C.Y. Jeong
◽
...
Keyword(s):
Phase Shift
◽
Extreme Ultraviolet
◽
Dry Etching
◽
Extreme Ultraviolet Lithography
◽
Inductively Coupled Plasmas
◽
Ultraviolet Lithography
◽
Inductively Coupled
◽
Coupled Plasmas
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Technological challenges in implementation of alternating phase-shift mask
10.1117/12.410720
◽
2001
◽
Author(s):
Wilman Tsai
◽
Qi-De Qian
◽
Ken M. Buckmann
◽
Wen-Hao Cheng
◽
Long He
◽
...
Keyword(s):
Phase Shift
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
Download Full-text
Practical phase control technique for alternating phase-shift mask fabrication
10.1117/12.392040
◽
2000
◽
Author(s):
Masahiko Takahashi
◽
Akihiro Miyake
◽
Hidetaka Saitou
◽
Hiroyuki Miyashita
◽
Shiaki M. Murai
Keyword(s):
Phase Shift
◽
Phase Control
◽
Control Technique
◽
Phase Shift Mask
◽
Alternating Phase Shift Mask
◽
Mask Fabrication
Download Full-text
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