Feasibility study of PZT thin-film sensors and actuators for smart microstructures and MEMS devices

2002 ◽  
Author(s):  
Yi-Chu Hsu ◽  
I. Y. Shen ◽  
G. Z. Cao
Keyword(s):  
Thin Film ◽  
Feasibility Study ◽  
Mems Devices ◽  
Sensors And Actuators ◽  
Thin Film Sensors ◽  
Pzt Thin Film

Demonstration and characterization of PZT thin-film sensors and actuators for meso- and micro-structures

2004 ◽  
Vol 116 (3) ◽  
pp. 369-377 ◽  
Author(s):  
Yi-Chu Hsu ◽  
Chia-Che Wu ◽  
Cheng-Chun Lee ◽  
G.Z. Cao ◽  
I.Y. Shen
Keyword(s):  
Thin Film ◽  
Sensors And Actuators ◽  
Thin Film Sensors ◽  
Pzt Thin Film ◽  
Micro Structures

Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

2009 ◽  
Vol 421-422 ◽  
pp. 95-98
Author(s):  
Tsuyoshi Aoki ◽  
Shigeyoshi Umemiya ◽  
Masaharu Hida ◽  
Kazuaki Kurihara
Keyword(s):  
Thin Film ◽  
Fem Analysis ◽  
Active Part ◽  
Piezoelectric Response ◽  
Small Displacement ◽  
Shear Mode ◽  
Mems Devices ◽  
Pzt Film ◽  
Pzt Thin Film ◽  
Piezoelectric Constants

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

Voice-supported Active Touch Panel Using Micro Touch Sensor with PZT Thin Film

2003 ◽  
Vol 15 (4) ◽  
pp. 384-390
Author(s):  
Gui Ryong Kwon ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
Koichi Itoigawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Active Touch ◽  
Online Information ◽  
Navigation Systems ◽  
Touch Panel ◽  
Thin Film Sensors ◽  
Touch Sensor ◽  
Pzt Thin Film ◽  
The Many ◽  
The Voice

Today's automobiles serve not only as vehicles but also as mobile offices combining communication tools such as cellphones and car navigation systems providing online information services. The many switches are conventionally distributed on the dashboard. A move is under way, however, to combine them into a multifunctional touch panel. We propose a voice-supported active touch panel. Since information feedback to the operator is important in ensuring correct function selection, the panel we designed combines a vibrator and voice explanation. Touch sensors use PZT thin film sensors. The voice explanation uses a quick response system. This paper reports the features and configuration of the voice-supported active touch panel.

Study on mechanical characteristics of PZT thin film for sensors and actuators

1995 ◽  
Author(s):  
Shyuichi Wakabayashi ◽  
Hiromi Totani ◽  
Minoru Sakata ◽  
Masaaki Ikeda ◽  
Hiroshi Goto ◽  
...  
Keyword(s):  
Thin Film ◽  
Mechanical Characteristics ◽  
Sensors And Actuators ◽  
Pzt Thin Film

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Piezoelectric PZT thin-film transformers with a ring–dot structure

2020 ◽  
Vol 59 (SP) ◽  
pp. SPPD09
Author(s):  
Sang-Hyo Kweon ◽  
Kazuki Tani ◽  
Kensuke Kanda ◽  
Sahn Nahm ◽  
Isaku Kanno
Keyword(s):  
Thin Film ◽  
Pzt Thin Film
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