Reactive ion etching of motheye and photonic crystal silicon nanostructures using CBrF 3

2005 ◽  
Author(s):  
G.J. Sonek ◽  
V.G. Kreismanis
Keyword(s):  
Photonic Crystal ◽  
Reactive Ion Etching ◽  
Silicon Nanostructures ◽  
Crystal Silicon ◽  
Ion Etching

Light Emission from Silicon Nanostructures Produced by Conventional Lithographic and Reactive Ion Etching Techniques

1995 ◽  
Vol 190 (1) ◽  
pp. 91-95 ◽  
Author(s):  
A. G. Nassiopoulos ◽  
S. Grigoropoulos ◽  
D. Papadimitriou ◽  
E. Gocolides
Keyword(s):  
Light Emission ◽  
Reactive Ion Etching ◽  
Silicon Nanostructures ◽  
Ion Etching

The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching

2009 ◽  
Vol 20 (6) ◽  
pp. 065307 ◽  
Author(s):  
N Chekurov ◽  
K Grigoras ◽  
A Peltonen ◽  
S Franssila ◽  
I Tittonen
Keyword(s):  
Reactive Ion Etching ◽  
Silicon Nanostructures ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching

2013 ◽  
Vol 110 ◽  
pp. 177-182 ◽  
Author(s):  
M. Rommel ◽  
M. Rumler ◽  
A. Haas ◽  
A.J. Bauer ◽  
L. Frey
Keyword(s):  
Reactive Ion Etching ◽  
Silicon Nanostructures ◽  
Ion Etching
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