Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography
2003 ◽
Vol 138
(2-3)
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pp. 124-131
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2002 ◽
Vol 68
(675)
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pp. 1658-1665
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2008 ◽
Vol 180
(4)
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pp. 2313-2321
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2004 ◽
Vol 172
(9)
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pp. 5684-5692
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Keyword(s):
2004 ◽
Vol 47
(2)
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pp. 198-206
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1987 ◽
Vol 45
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pp. 650-651
1987 ◽
Vol 45
◽
pp. 633-635