Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography

2012 ◽  
Vol 11 (2) ◽  
pp. 021111-1 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tamotsu Abe ◽  
Satoshi Tanaka ◽  
Takeshi Ohta ◽  
Tsukasa Hori ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
High Volume ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Laser-produced plasma light source for extreme ultraviolet lithography

2013 ◽  
Vol 6 (1) ◽  
pp. 20-33
Author(s):  
窦银萍 DOU Yin-ping ◽  
孙长凯 SUN Chang-kai ◽  
林景全 LIN Jing-quan
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography

2020 ◽  
Vol 13 (1) ◽  
pp. 28-42
Author(s):  
宗 楠 ZONG Nan ◽  
胡蔚敏 HU Wei-min ◽  
王志敏 WANG Zhi-min ◽  
王小军 WANG Xiao-jun ◽  
张申金 ZHANG Shen-jin ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Research Progress ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Laser-Produced Plasma Light Source Development for Extreme Ultraviolet Lithography

2004 ◽  
Vol 43 (6B) ◽  
pp. 3707-3712 ◽  
Author(s):  
Hiroshi Komori ◽  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

scholarly journals Development of Extreme-Ultraviolet Light Source by Laser-Produced Plasma

2008 ◽  
Vol 36 (APLS) ◽  
pp. 1125-1128 ◽  
Author(s):  
Hiroaki NISHIMURA ◽  
Shinsuke FUJIOKA ◽  
Masashi SHIMOMURA ◽  
Hirokazu SAKAGUCHI ◽  
Yuki NAKAI ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

2006 ◽  
Vol 89 (18) ◽  
pp. 181109 ◽  
Author(s):  
Hiroki Tanaka ◽  
Yuki Hashimoto ◽  
Kouji Tamaru ◽  
Akihiko Takahashi ◽  
Tatsuo Okada
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Imaging Technique ◽  
Laser Imaging ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Laser-produced-plasma light source development for extreme ultraviolet lithography

2003 ◽  
Vol 21 (6) ◽  
pp. 2843 ◽  
Author(s):  
Hiroshi Komori ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Yukihiko Sugimoto ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Laser-produced plasma light source for extreme-ultraviolet lithography applications

2012 ◽  
Vol 11 (2) ◽  
pp. 021114-1 ◽  
Author(s):  
Reza S. Abhari ◽  
Bob Rollinger ◽  
Andrea Z. Giovannini ◽  
Oran Morris ◽  
Ian Henderson ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

scholarly journals EUV (Extreme Ultraviolet) Light Source by Laser Produced Plasma Using Tin Through-hole Targets

2009 ◽  
Vol 75 (8) ◽  
pp. 967-972
Author(s):  
Motohiro NAKANO ◽  
Yasuyuki SANDA ◽  
Haruyuki INOUE ◽  
Yasushi OSHIKANE ◽  
Toshihiko KATAOKA
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light ◽  
Through Hole
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