Optimization of pupil sampling scheme for aerial-image-based aberration measurement of projection optics in lithographic tools

2009 ◽  
Author(s):  
Lijuan Wang ◽  
Shiyuan Liu ◽  
Wei Liu ◽  
Tingting Zhou
Keyword(s):  
Sampling Scheme ◽  
Aerial Image ◽  
Projection Optics

Trefoil Aberration Measurement of Lithographic Projection Optics Based on Linewidth Asymmetry of the Aerial Image

2019 ◽  
Vol 18 (1) ◽  
pp. 373-379
Author(s):  
Qiongyan Yuan ◽  
Xiangzhao Wang ◽  
Zicheng Qiu
Keyword(s):  
Aerial Image ◽  
Projection Optics

Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image

Optik ◽  
2010 ◽  
Vol 121 (19) ◽  
pp. 1739-1742 ◽  
Author(s):  
Qiongyan Yuan ◽  
Xiangzhao Wang ◽  
Zicheng Qiu
Keyword(s):  
Aerial Image ◽  
Projection Optics

scholarly journals A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image

2018 ◽  
Vol 26 (25) ◽  
pp. 32743 ◽  
Author(s):  
Enze Li ◽  
Yanqiu Li ◽  
Naiyuan Sheng ◽  
Tie Li ◽  
Yiyu Sun ◽  
...  
Keyword(s):  
Spectrum Analysis ◽  
Measurement Method ◽  
Aerial Image ◽  
Projection Optics

Detection of Terahertz Pulsed Radiation by using Heterodyne Electro-Optic Sampling Scheme

2012 ◽  
Vol 132 (9) ◽  
pp. 727-733
Author(s):  
Masahiko Tani ◽  
Michael I. Bakunov ◽  
Kohji Yamamoto ◽  
Kazuki Horita ◽  
Tetsuya Kinoshita ◽  
...  
Keyword(s):  
Sampling Scheme ◽  
Electro Optic
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