scholarly journals A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image

2018 ◽  
Vol 26 (25) ◽  
pp. 32743 ◽  
Author(s):  
Enze Li ◽  
Yanqiu Li ◽  
Naiyuan Sheng ◽  
Tie Li ◽  
Yiyu Sun ◽  
...  
Keyword(s):  
Spectrum Analysis ◽  
Measurement Method ◽  
Aerial Image ◽  
Projection Optics

Trefoil Aberration Measurement of Lithographic Projection Optics Based on Linewidth Asymmetry of the Aerial Image

2019 ◽  
Vol 18 (1) ◽  
pp. 373-379
Author(s):  
Qiongyan Yuan ◽  
Xiangzhao Wang ◽  
Zicheng Qiu
Keyword(s):  
Aerial Image ◽  
Projection Optics

Metal corrosion measurement method based on optical reflection spectrum analysis

2018 ◽  
Author(s):  
Hee Taek Cho ◽  
Ok Rak Lim ◽  
Gyeong-Seo Seo ◽  
Kyu Hyuk Lee ◽  
Tae Jun Park ◽  
...  
Keyword(s):  
Spectrum Analysis ◽  
Reflection Spectrum ◽  
Measurement Method ◽  
Metal Corrosion ◽  
Optical Reflection ◽  
Optical Reflection Spectrum

Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image

Optik ◽  
2010 ◽  
Vol 121 (19) ◽  
pp. 1739-1742 ◽  
Author(s):  
Qiongyan Yuan ◽  
Xiangzhao Wang ◽  
Zicheng Qiu
Keyword(s):  
Aerial Image ◽  
Projection Optics

Projection Lens Wave-Front Aberration Measurement Method Based on Adaptive Aerial Image Denoising

2013 ◽  
Vol 33 (1) ◽  
pp. 0111003
Author(s):  
杨济硕 Yang Jishuo ◽  
李思坤 Li Sikun ◽  
王向朝 Wang Xiangzhao ◽  
闫观勇 Yan Guanyong ◽  
徐东波 Xu Dongbo
Keyword(s):  
Wave Front ◽  
Image Denoising ◽  
Measurement Method ◽  
Aerial Image ◽  
Projection Lens

Research of Minute-Particle Height Measurement Method Based on Microscopic Imaging and Projection Optics

2012 ◽  
Vol 49 (8) ◽  
pp. 081201
Author(s):  
唐春晓 Tang Chunxiao ◽  
李恩邦 Li Enbang ◽  
吴亚北 Wu Yabei
Keyword(s):  
Measurement Method ◽  
Height Measurement ◽  
Microscopic Imaging ◽  
Projection Optics
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