Fundamentals and technology for monolithically integrated RF MEMS switches with ultra-nanocrystalline diamond dielectric/CMOS devices

2010 ◽  
Author(s):  
O. Auciello ◽  
A. V. Sumant ◽  
C. Goldsmith ◽  
S. O'Brien ◽  
S. Sampath ◽  
...  
Keyword(s):  
Rf Mems ◽  
Nanocrystalline Diamond ◽  
Mems Switches ◽  
Monolithically Integrated ◽  
Rf Mems Switches

Ka-Band Radiation Pattern Reconfigurable Microstrip Patch Antenna Employing MEMS Switches

2013 ◽  
Vol 411-414 ◽  
pp. 1674-1679 ◽  
Author(s):  
Zhong Liang Deng ◽  
Hua Gong ◽  
Sen Fan ◽  
Cai Hu Chen
Keyword(s):  
Resonant Frequency ◽  
Radiation Pattern ◽  
Insertion Loss ◽  
Patch Antenna ◽  
Rf Mems ◽  
Microstrip Patch Antenna ◽  
Mems Switches ◽  
Monolithically Integrated ◽  
Microstrip Patch ◽  
Rf Mems Switches

This article describes the design of a microstrip patch antenna with radiation pattern reconfigurable characteristic, where two monolithically integrated MEMS switches are utilized. By changing the physical dimension of the antenna, its radiation pattern could be changed. Moreover, we present detailed structures of these RF MEMS switches, whose isolation and insertion loss are-23.12 dB and-0.09 dB at operating frequency, respectively. And the resonant frequency of the antenna is 35.4 GHz and the bandwidth is 6.69%. All the results are simulated.

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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