2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest
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104

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A MEMS PHOSPHONATE SENSOR

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.65 ◽

2008 ◽

Author(s):

C.N. Monty ◽

I. Oh ◽

M.A. Shannon ◽

R.I. Masel

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A NEW EXTRINSIC GETTERING TECHNIQUE IN THICK BONDED SILICON-ON-INSULATOR WAFERS ENABLING SENSOR-IC INTEGRATION

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.53 ◽

2008 ◽

Author(s):

P. Sandow ◽

S. Whiston ◽

P. Daly ◽

J. Mäkinen ◽

J. Hintsala ◽

...

Keyword(s):

Silicon On Insulator

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A MICRO-PRECONCENTRATOR/FOCUSER FOR A MICRO-GAS CHROMATOGRAPH: DEVICE AND MATERIALS CHARACTERIZATION

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.66 ◽

2008 ◽

Author(s):

R.A. Veeneman ◽

E.T. Zellers

Keyword(s):

Materials Characterization ◽

Gas Chromatograph

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FABRICATION OF ATOM TRAPPING CHIPS WITH FEEDTHROUGH INTERCONNECTS FOR APPLICATIONS IN ATOM OPTICS

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.56 ◽

2008 ◽

Author(s):

H.C. Chuang ◽

D.Z. Anderson ◽

V.M. Bright

Keyword(s):

Atom Optics ◽

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LOW-TEMPERATURE (<300ºC) LOW-STRESS SILICON CARBIDE SURFACE MICROMACHINING FABRICATION TECHNOLOGY

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.57 ◽

2008 ◽

Author(s):

F. Nabki ◽

T.A. Dusatko ◽

S. Vengallatore ◽

M.N. El-Gamal

Keyword(s):

Silicon Carbide ◽

Low Temperature ◽

Surface Micromachining ◽

Fabrication Technology

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IN-SITU TUNING OF MICRODEVICES FOR DIRECTIONAL MICROPHONE APPLICATIONS

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.61 ◽

2008 ◽

Author(s):

S.-S. Je ◽

J.C. Harrison ◽

M.N. Kozicki ◽

J. Chae

Keyword(s):

Directional Microphone

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DYNAMIC FRICTION AND MICROTURBINE PERFORMANCE USING A PLANAR-CONTACT ENCAPSULATED MICROBALL BEARING

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.46 ◽

2008 ◽

Author(s):

M. McCarthy ◽

C.M. Waits ◽

R. Ghodssi

Keyword(s):

Dynamic Friction ◽

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SILICON AS A BIOMEDICAL MATERIAL

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.1 ◽

2008 ◽

Author(s):

M. Ferrari ◽

M.M.-C. Cheng ◽

E. Tasciotti

Keyword(s):

Biomedical Material

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PRINTING MEMS: FROM A SINGLE FLEXIBLE POLYMIDE FILM TO THREE-DIMENSIONAL INTEGRATED MICROFLUIDICS

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.62 ◽

2008 ◽

Author(s):

W. Wang ◽

Z. Qiu ◽

S. Zhao ◽

H. Cong ◽

T. Pan ◽

...

Keyword(s):

Three Dimensional ◽

Integrated Microfluidics

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FRACTURE PREDICTION OF SINGLE CRYSTAL SILICON MEMS UNDER MULTI-AXIAL LOADING

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.30 ◽

2008 ◽

Author(s):

A.M. Fitzgerald ◽

D.M. Pierce ◽

C.D. White ◽

B.M. Huigens ◽

J.W. Eaton

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Axial Loading ◽

Fracture Prediction ◽

Crystal Silicon

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