This article describes the design of a microstrip patch antenna with radiation pattern reconfigurable characteristic, where two monolithically integrated MEMS switches are utilized. By changing the physical dimension of the antenna, its radiation pattern could be changed. Moreover, we present detailed structures of these RF MEMS switches, whose isolation and insertion loss are-23.12 dB and-0.09 dB at operating frequency, respectively. And the resonant frequency of the antenna is 35.4 GHz and the bandwidth is 6.69%. All the results are simulated.
Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators