Use Of Adaptive Optics Element For Wavefront Error Correction In The Gemini CO2 Laser Fusion System

1980 ◽  
Author(s):  
V. K. Viswanathan ◽  
J. V. Parker ◽  
T. A. Nussmier ◽  
C. J. Swigert ◽  
W. King ◽  
...  
1979 ◽  
Vol 15 (9) ◽  
pp. 983-983 ◽  
Author(s):  
V. Viswanathan ◽  
J. Parker ◽  
T. Nussmeier ◽  
C. Swigert ◽  
W. King ◽  
...  

2014 ◽  
Vol 91 (10) ◽  
pp. 1238-1243 ◽  
Author(s):  
Ali Kord Valeshabad ◽  
Justin Wanek ◽  
Patricia Grant ◽  
Jennifer I. Lim ◽  
Felix Y. Chau ◽  
...  

Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.


1982 ◽  
Vol 10 (1) ◽  
pp. 3-12 ◽  
Author(s):  
Yoshiyuki ASAHARA ◽  
Tetsuro IZUMITANI

2012 ◽  
Author(s):  
Kate Jackson ◽  
Carlos Correia ◽  
Olivier Lardière ◽  
David Andersen ◽  
Colin Bradley

2019 ◽  
Vol 58 (01) ◽  
pp. 1
Author(s):  
Deqing Ren ◽  
Gang Wang ◽  
Xi Zhang

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