Optical Lithography: Here is Why, Second Edition

2021 ◽  
Author(s):  
Burn J. Lin
Keyword(s):  
Optical Lithography

Quasi-3D plasmonic coupling scheme for near-field optical lithography and imaging

2015 ◽  
Vol 40 (16) ◽  
pp. 3918 ◽  
Author(s):  
Yuan Wang ◽  
Zhidong Du ◽  
Yongshik Park ◽  
Chen Chen ◽  
Xiang Zhang ◽  
...  
Keyword(s):  
Near Field ◽  
Optical Lithography ◽  
Coupling Scheme ◽  
Plasmonic Coupling

scholarly journals Fabrication of Texturing Antireflection Structures in Solar Cells by Using the Defocusing Exposure in Optical Lithography

2006 ◽  
Vol 153 (9) ◽  
pp. G802 ◽  
Author(s):  
H. L. Chen ◽  
Wonder Fan ◽  
C. C. Cheng ◽  
C. H. Lin ◽  
K. T. Huang
Keyword(s):  
Solar Cells ◽  
Optical Lithography

Sub-12nm optical lithography with 4x pitch division and SMO-lite

2013 ◽  
Author(s):  
Michael C. Smayling ◽  
Koichiro Tsujita ◽  
Hidetami Yaegashi ◽  
Valery Axelrad ◽  
Tadashi Arai ◽  
...  
Keyword(s):  
Optical Lithography

scholarly journals Energy flow in light-coupling masks for lensless optical lithography

1998 ◽  
Vol 3 (7) ◽  
pp. 280 ◽  
Author(s):  
Olivier J. F. Martin ◽  
Nicolas B. Piller ◽  
Heinz Schmid ◽  
Hans Biebuyck ◽  
Bruno Michel
Keyword(s):  
Energy Flow ◽  
Optical Lithography ◽  
Light Coupling
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