Nonlocal nature of the electron energy spectrum in a glow discharge in pure O2: I. Nonlocal character of the electron distribution function

2000 ◽  
Vol 26 (11) ◽  
pp. 972-979 ◽  
Author(s):  
V. V. Ivanov ◽  
K. S. Klopovskii ◽  
D. V. Lopaev ◽  
A. T. Rakhimov ◽  
T. V. Rakhimova
Keyword(s):  
Distribution Function ◽  
Energy Spectrum ◽  
Glow Discharge ◽  
Electron Energy ◽  
Electron Distribution ◽  
Electron Distribution Function ◽  
Electron Energy Spectrum ◽  
Nonlocal Nature

Nonlocal nature of the electron energy spectrum in a glow-discharge in pure O2: II. Actinometry of O(3 P) atoms in a plasma at low gas pressures

2000 ◽  
Vol 26 (11) ◽  
pp. 980-990 ◽  
Author(s):  
V. V. Ivanov ◽  
K. S. Klopovskii ◽  
D. V. Lopaev ◽  
A. T. Rakhimov ◽  
T. V. Rakhimova
Keyword(s):  
Energy Spectrum ◽  
Glow Discharge ◽  
Electron Energy ◽  
Electron Energy Spectrum ◽  
Nonlocal Nature ◽  
Gas Pressures

The Effect of Reactor Pressure on the Growth of Glow Discharge a-SiN:H

1989 ◽  
Vol 165 ◽  
Author(s):  
W. J. Varhue ◽  
K. A. Pandelisev
Keyword(s):  
Electrical Resistivity ◽  
Energy Spectrum ◽  
Glow Discharge ◽  
Electron Energy ◽  
Substrate Surface ◽  
Ion Bombardment ◽  
Electron Energy Spectrum ◽  
N Content ◽  
Reactor Pressure

AbstractThe electrical resistivity and N content of a-SiN:H films can be controlled by varying the reactor pressure. This appears to be a result of the increased dissociation of the ammonia feed gas by the change in the electron energy spectrum. The effect of ion bombardment of the substrate surface does not result in observable changes in film quality.

Effect of the nonlocal nature of the electron energy spectrum on the dissociation of oxygen molecules in a discharge

2004 ◽  
Vol 30 (6) ◽  
pp. 542-548 ◽  
Author(s):  
K. S. Klopovskiy ◽  
D. V. Lopaev ◽  
O. V. Proshina ◽  
A. T. Rakhimov ◽  
T. V. Rakhimova
Keyword(s):  
Energy Spectrum ◽  
Electron Energy ◽  
Electron Energy Spectrum ◽  
Nonlocal Nature

Thermodynamic activity and electron energy spectrum of metallic solutions

2014 ◽  
Vol 44 (2) ◽  
pp. 90-95
Author(s):  
I. F. Selyanin ◽  
V. B. Deev ◽  
A. I. Kutsenko ◽  
A. A. Kutsenko ◽  
O. G. Prikhod’ko
Keyword(s):  
Energy Spectrum ◽  
Electron Energy ◽  
Thermodynamic Activity ◽  
Electron Energy Spectrum
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