Metal nanocluster formation in silica films prepared by rf-sputtering: an experimental study

AbstractGold nanoparticles were deposited on SiO2, Si(100) and HOPG (Highly Oriented Pyrolitic Graphite) by RF-sputtering from Ar plasmas. Sample preparation was performed at temperatures as low as 60°C under different total pressures, RF-powers and deposition times, with particular attention to the influence of process parameters and growth surface on nanosystem properties. In this paper, the most important results regarding the compositional, structural and morphological features of the obtained specimens, are presented and discussed.

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An experimental study of charge distribution in crystalline and amorphous Si nanoclusters in thin silica films

Journal of Applied Physics ◽

10.1063/1.2832630 ◽

2008 ◽

Vol 103 (2) ◽

pp. 024308 ◽

Cited By ~ 23

Author(s):

Annett Thøgersen ◽

Spyros Diplas ◽

Jeyanthinath Mayandi ◽

Terje Finstad ◽

Arne Olsen ◽

...

Keyword(s):

Experimental Study ◽

Charge Distribution ◽

Silica Films ◽

Amorphous Si

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Blue Photoluminescence from Si-Doped Amorphous Silica Films by RF Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.2694 ◽

1996 ◽

Vol 35 (Part 1, No. 5A) ◽

pp. 2694-2697 ◽

Cited By ~ 15

Author(s):

Satoshi Yoshida ◽

Teiichi Hanada ◽

Setsuhisa Tanabe ◽

Naohiro Soga

Keyword(s):

Amorphous Silica ◽

Rf Sputtering ◽

Silica Films ◽

Si Doped ◽

Blue Photoluminescence

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Experimental study on the restoration from a tilt-azimuth series for improvement in resolution

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010013955x ◽

1995 ◽

Vol 53 ◽

pp. 636-637

Author(s):

Norio Baba ◽

Norihiko Ichise ◽

Syunya Watanabe

Keyword(s):

Experimental Study ◽

Spherical Aberration ◽

Incident Beam ◽

Optical Parameters ◽

Beam Tilting ◽

Illumination Method ◽

Restoration Method ◽

Illumination Mode

The tilted beam illumination method is used to improve the resolution comparing with the axial illumination mode. Using this advantage, a restoration method of several tilted beam images covering the full azimuthal range was proposed by Saxton, and experimentally examined. To make this technique more reliable it seems that some practical problems still remain. In this report the restoration was attempted and the problems were considered. In our study, four problems were pointed out for the experiment of the restoration. (1) Accurate beam tilt adjustment to fit the incident beam to the coma-free axis for the symmetrical beam tilting over the full azimuthal range. (2) Accurate measurements of the optical parameters which are necessary to design the restoration filter. Even if the spherical aberration coefficient Cs is known with accuracy and the axial astigmatism is sufficiently compensated, at least the defocus value must be measured. (3) Accurate alignment of the tilt-azimuth series images.

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