Field Emission in Silicon Vacuum Nanostructure

Transmission coefficient and field emission current in a silicon vacuum nanostructure with a pyramidal cathode were calculated as a function of applied voltage, size of the cathode and distance between the anode and cathode by the phase function method. The field emission current density in the range of 1–10 A/cm2 was found to be achieved by varying the distance between the anode and cathode in the range of 15–25[Formula: see text]nm and the applied voltage in the range of 1.2–2.3[Formula: see text]V.