Causes and Prevention of Temperature-Dependent Bubbles in Silicon Wafer Bonding

1991 ◽  
Vol 30 (Part 1, No. 4) ◽  
pp. 615-622 ◽  
Author(s):  
Kiyoshi Mitani ◽  
Volker Lehmann ◽  
Reinhard Stengl ◽  
Diego Feijoo ◽  
Ulrich M. Gösele ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Wafer Bonding ◽  
Temperature Dependent

Silicon-to-silicon wafer bonding using evaporated glass

1998 ◽  
Vol 70 (1-2) ◽  
pp. 179-184 ◽  
Author(s):  
Steen Weichel ◽  
Roger de Reus ◽  
Michael Lindahl
Keyword(s):  
Silicon Wafer ◽  
Wafer Bonding

Low Temperature Direct Silicon Wafer Bonding Using Argon Activation

1997 ◽  
Vol 36 (Part 2, No. 5A) ◽  
pp. L527-L528 ◽  
Author(s):  
Robert W. Bower ◽  
Frank Y.-J. Chin
Keyword(s):  
Low Temperature ◽  
Silicon Wafer ◽  
Wafer Bonding

Silicon Wafer Bonding Mechanism for Silicon-on-Insulator Structures

1990 ◽  
Vol 29 (Part 2, No. 12) ◽  
pp. L2311-L2314 ◽  
Author(s):  
Takao Abe ◽  
Tokio Takei ◽  
Atsuo Uchiyama ◽  
Katsuo Yoshizawa ◽  
Yasuaki Nakazato
Keyword(s):  
Silicon Wafer ◽  
Wafer Bonding ◽  
Silicon On Insulator ◽  
Bonding Mechanism

The role of hydrogen in silicon wafer bonding: an infrared study

2002 ◽  
Author(s):  
M.K. Weldon ◽  
Y.J. Chabal ◽  
S.B. Christman ◽  
J. Bourcereau ◽  
C.A. Goodwin ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Wafer Bonding ◽  
Infrared Study

Silicon wafer‐to‐wafer bonding atT<200 °C with polymethylmethacrylate

1994 ◽  
Vol 65 (4) ◽  
pp. 439-441 ◽  
Author(s):  
William P. Eaton ◽  
Subhash H. Risbud ◽  
Rosemary L. Smith
Keyword(s):  
Silicon Wafer ◽  
Wafer Bonding

ChemInform Abstract: Analysis of Bonding-Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding.

ChemInform ◽  
2010 ◽  
Vol 28 (26) ◽  
pp. no-no
Author(s):  
S. MACK ◽  
H. BAUMANN ◽  
U. GOESELE ◽  
H. WERNER ◽  
R. SCHLOEGL
Keyword(s):  
Silicon Wafer ◽  
Wafer Bonding
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