1H Nuclear Magnetic Resonance Study of Hydrogenated Amorphous Silicon Deposited from a Xe-diluted Silane Plasma

1992 ◽  
Vol 31 (Part 1, No. 4) ◽  
pp. 989-994 ◽  
Author(s):  
Shigenobu Hayashi ◽  
Kikuko Hayamizu ◽  
Satoshi Mashima ◽  
Atsushi Suzuki ◽  
Peter J. Mcelheny ◽  
...  
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