silane plasma Recently Published Documents

Synergistic toughening and electrical functionalization of an epoxy using MWCNTs and silane‐ /plasma‐activated basalt fibers

Journal of Applied Polymer Science ◽

10.1002/app.49605 ◽

2020 ◽

Vol 138 (1) ◽

pp. 49605

Author(s):

Dong Quan ◽

Peter Moloney ◽

Declan Carolan ◽

Hisham Abourayana ◽

Calvin Ralph ◽

...

Keyword(s):

Basalt Fibers ◽

Effect of gas-phase processes in argon-helium-silane plasma on amorphous-nanocrystalline transition in thin films of a-Si:H

Journal of Physics Conference Series ◽

10.1088/1742-6596/1260/6/062014 ◽

2019 ◽

Vol 1260 ◽

pp. 062014

Author(s):

A A Lyakhov ◽

V I Strunin ◽

G Zh Khudaibergenov

Keyword(s):

Thin Films ◽

Gas Phase ◽

Time Resolved Optical Emission Spectrum for Hydrogen and Hydrogen/Silane Plasma

Chinese Journal of Luminescence ◽

10.3788/fgxb20194004.0528 ◽

2019 ◽

Vol 40 (4) ◽

pp. 528-534

Author(s):

张发荣 ZHANG Fa-rong ◽

张晓丹 ZHANG Xiao-dan ◽

AMANATIDES E AMANATIDES E ◽

赵颖 ZHAO Ying

Keyword(s):

Emission Spectrum ◽

Optical Emission ◽

Optical Emission Spectrum ◽

Time Resolved ◽

Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aae5cf ◽

2018 ◽

Vol 52 (1) ◽

pp. 015206 ◽

Author(s):

Wen-Zhu Jia ◽

Quan-Zhi Zhang ◽

Xi-Feng Wang ◽

Yuan-Hong Song ◽

Ying-Ying Zhang ◽

...

Keyword(s):

Particle Size ◽

Radio Frequency ◽

Dust Particle ◽

Capacitively Coupled ◽

Plasma Characteristics ◽

Particle behavior and its contribution to film growth in a remote silane plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5037539 ◽

2018 ◽

Vol 36 (5) ◽

pp. 050601 ◽

Author(s):

Yeonwon Kim ◽

Kazunori Koga ◽

Masaharu Shiratani

Keyword(s):

Film Growth ◽

Particle Behavior ◽

NUMERICAL ANALYSIS OF THE KINETICS OF CHEMICAL REACTIONS IN AN ARGON-SILANE PLASMA OF THE GLOW DISCHARGE

Vestnik Tomskogo gosudarstvennogo universiteta Matematika i mekhanika ◽

10.17223/19988621/50/7 ◽

2017 ◽

pp. 79-89

Author(s):

Anatoliy Aleksandrovich LYAKHOV ◽

◽

Vladimir Ivanovich STRUNIN ◽

Keyword(s):

Numerical Analysis ◽

Glow Discharge ◽

Chemical Reactions ◽

Kinetics Of ◽

Complex Reaction Network in Silane Plasma Chemistry

Complex Networks VIII - Springer Proceedings in Complexity ◽

10.1007/978-3-319-54241-6_11 ◽

2017 ◽

pp. 135-140 ◽

Author(s):

Yasutaka Mizui ◽

Kyosuke Nobuto ◽

Shigeyuki Miyagi ◽

Osamu Sakai

Keyword(s):

Plasma Chemistry ◽

Reaction Network ◽

Complex Reaction ◽

Laser light scattering from silicon particles generated in an argon diluted silane plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/49/8/085203 ◽

2016 ◽

Vol 49 (8) ◽

pp. 085203 ◽

Cited By ~ 4

Author(s):

Y Qin ◽

N Bilik ◽

U R Kortshagen ◽

E S Aydil

Keyword(s):

Light Scattering ◽

Laser Light ◽

Laser Light Scattering ◽

Silane Plasma ◽

Silicon Particles

Hybrid kinetic/fluid modeling of silicon nanoparticles dynamics in silane plasma discharges

10.1063/1.4967630 ◽

2016 ◽

Author(s):

J.-M. Orlac’h ◽

V. Giovangigli ◽

T. Novikova ◽

P. Roca i Cabarrocas

Keyword(s):

Silicon Nanoparticles ◽

Plasma Discharges ◽

Fluid Modeling ◽