Transparent Conducting Boron-Doped Zinc Oxide Films Deposited by DC-Magnetron Sputtering in $\bf B_{2}H_{6}\mbox{-}Ar$ Mixtures

1995 ◽  
Vol 34 (Part 1, No. 7A) ◽  
pp. 3623-3627 ◽  
Author(s):  
Tokio Nakada ◽  
Yukiyasu Ohkubo ◽  
Naoki Murakami ◽  
Akio Kunioka
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Boron Doped ◽  
Transparent Conducting

Structure and Internal Stress of Tin-Doped Indium Oxide and Indium–Zinc Oxide Films Deposited by DC Magnetron Sputtering

2007 ◽  
Vol 46 (12) ◽  
pp. 7806-7811 ◽  
Author(s):  
Eriko Nishimura ◽  
Tomoko Sasabayashi ◽  
Norihiro Ito ◽  
Yasushi Sato ◽  
Kentaro Utsumi ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide

Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering Using Ar, Ne or Kr Gas

2002 ◽  
Vol 41 (Part 1, No. 10) ◽  
pp. 6174-6179 ◽  
Author(s):  
Masato Kon ◽  
Pung Keun Song ◽  
Akira Mitsui ◽  
Yuzo Shigesato
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films

Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering

2011 ◽  
Vol 520 (2) ◽  
pp. 726-729 ◽  
Author(s):  
T. Tohsophon ◽  
N. Wattanasupinyo ◽  
B. Silskulsuk ◽  
N. Sirikulrat
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Co Doping ◽  
Zinc Oxide Films
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