Crystal Orientation Dependence of Piezoelectric Properties in Lead Zirconate Titanate: Theoretical Expectation for Thin Films

1997 ◽  
Vol 36 (Part 1, No. 9A) ◽  
pp. 5580-5587 ◽  
Author(s):  
Xiao-hong Du ◽  
Uma Belegundu ◽  
Kenji Uchino
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Crystal Orientation ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Orientation Dependence ◽  
Theoretical Expectation ◽  
Zirconate Titanate

Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

2019 ◽  
Vol 239 ◽  
pp. 71-74 ◽  
Author(s):  
Tomoya Ohno ◽  
Kentaroh Fukumitsu ◽  
Takamasa Honda ◽  
Akinori Sakamoto ◽  
Sadaaki Tanaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Si Substrate ◽  
Zirconate Titanate

scholarly journals Effects of ferroelectric fatigue on the piezoelectric properties (d33) of tetragonal lead zirconate titanate thin films

2005 ◽  
Vol 86 (11) ◽  
pp. 112908 ◽  
Author(s):  
P. Gerber ◽  
C. Kügeler ◽  
U. Ellerkmann ◽  
P. Schorn ◽  
U. Böttger ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Zirconate Titanate

Orientation Dependence of Strontium-doped Lead Zirconate Titanate (PSZT) Thin Films on RF Magnetron Sputtering Conditions

2006 ◽  
Vol 928 ◽  
Author(s):  
Sharath Sriram ◽  
Madhu Bhaskaran ◽  
Anthony Stephen Holland ◽  
Geoffrey K Reeves
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Cooling Rate ◽  
Lead Zirconate Titanate ◽  
Ferroelectric Properties ◽  
Rf Magnetron Sputtering ◽  
Lead Zirconate ◽  
Orientation Dependence ◽  
Grain Structure ◽  
Zirconate Titanate

ABSTRACTStudies on strontium-doped lead zirconate titanate (PSZT) have been reported for its high piezoelectric and ferroelectric properties. For PSZT to exhibit pronounced piezoelectric behaviour it must have a crystalline grain structure (perovskite orientation). This paper is a study of the deposition of PSZT thin films by RF magnetron sputtering and the effect of cooling rate, after deposition at temperatures between 500 °C and 700 °C. X-Ray Diffraction (XRD) results are used to show how a cooling rate of 5 °C/min increases the degree of perovskite orientation in sputtered films, when compared to a cooling rate of 15 °C/min. The absence of significant shifts in the positions of diffraction peak patterns in XRD results are used to demonstrate low stress in the deposited films. Atomic Force Microscope (AFM) imaging is used to show the crystalline nature of the PSZT thin films.

Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates

2014 ◽  
Vol 40 (1) ◽  
pp. 1013-1018 ◽  
Author(s):  
Minh D. Nguyen ◽  
Thong Q. Trinh ◽  
Matthijn Dekkers ◽  
Evert P. Houwman ◽  
Hung N. Vu ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Si Substrates ◽  
Zirconate Titanate ◽  
Ferroelectric And Piezoelectric Properties
Sign in / Sign up

Export Citation Format

Share Document