Analysis of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.3049 ◽

2000 ◽

Vol 39 (Part 1, No. 5B) ◽

pp. 3049-3053 ◽

Author(s):

Hirofumi Kanbara ◽

Hideaki Kobayashi ◽

Kiyoshi Nakamura

Keyword(s):

Thin Film ◽

Quarter Wave ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

Fabrication of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.3455 ◽

2002 ◽

Vol 41 (Part 1, No. 5B) ◽

pp. 3455-3457 ◽

Author(s):

Hideaki Kobayashi ◽

Yasuaki Ishida ◽

Kazuo Ishikawa ◽

Arata Doi ◽

Kiyoshi Nakamura

Keyword(s):

Thin Film ◽

Quarter Wave ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2005.1428043 ◽

2005 ◽

Vol 52 (4) ◽

pp. 604-609 ◽

Author(s):

K. Nakamura ◽

S. Sato ◽

S. Ohta ◽

K. Yamada ◽

A. Doi

Keyword(s):

Thin Film ◽

Lateral Direction ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

Temperature characteristics of solidly mounted piezoelectric thin film resonators

IEEE Symposium on Ultrasonics, 2003 ◽

10.1109/ultsym.2003.1293312 ◽

2004 ◽

Author(s):

S. Ohta ◽

K. Nakamura ◽

A. Doi ◽

Y. Ishida

Keyword(s):

Thin Film ◽

Temperature Characteristics ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

A laminated plate theory for high frequency, piezoelectric thin‐film resonators

Journal of Applied Physics ◽

10.1063/1.354619 ◽

1993 ◽

Vol 74 (5) ◽

pp. 3028-3046 ◽

Author(s):

Y.‐K. Yong ◽

J. T. Stewart ◽

A. Ballato

Keyword(s):

Thin Film ◽

High Frequency ◽

Plate Theory ◽

Laminated Plate ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

Theoretical analysis of a piezoelectric thin film resonator with acoustic quarter-wave multilayers

Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165) ◽

10.1109/freq.1998.718003 ◽

2002 ◽

Author(s):

K. Nakamura ◽

H. Kanbara

Keyword(s):

Thin Film ◽

Theoretical Analysis ◽

Quarter Wave ◽

Piezoelectric Thin Film

Download Full-text

The effective electromechanical coupling coefficient of piezoelectric thin-film resonators

Applied Physics Letters ◽

10.1063/1.1850615 ◽

2005 ◽

Vol 86 (2) ◽

pp. 022904 ◽

Author(s):

Qingming Chen ◽

Qing-Ming Wang

Keyword(s):

Thin Film ◽

Coupling Coefficient ◽

Electromechanical Coupling ◽

Electromechanical Coupling Coefficient ◽

Piezoelectric Thin Film ◽

Thin Film Resonators ◽

Effective Electromechanical Coupling Coefficient

Download Full-text

Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators

IEEE Symposium on Ultrasonics, 2003 ◽

10.1109/ultsym.2003.1293175 ◽

2004 ◽

Author(s):

K. Nakamura ◽

S. Sato ◽

S. Ohta ◽

K. Yamada ◽

A. Doi

Keyword(s):

Thin Film ◽

Lateral Direction ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

Shear Mode Piezoelectric Thin Film Resonators

Acoustic Waves - From Microdevices to Helioseismology ◽

10.5772/18797 ◽

2011 ◽

Author(s):

Takahiko Yanagitani

Keyword(s):

Thin Film ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

Download Full-text

Design and Measurement of a Terahertz Large-Aperture Quarter-Wave Plate with Double-layer Metal Cut Wires on a Flexible and Thin Film

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.135.478 ◽

2015 ◽

Vol 135 (11) ◽

pp. 478-479

Author(s):

Takehito Suzuki ◽

Ryuji Ohuchi ◽

Nozomu Koja ◽

Koki Ishihara

Keyword(s):

Thin Film ◽

Double Layer ◽

Quarter Wave Plate ◽

Large Aperture ◽

Download Full-text

Analytical solutions of electroelastic fields in piezoelectric thin-film multilayer: applications to piezoelectric sensors and actuators

Acta Mechanica ◽

10.1007/s00707-019-02582-w ◽

2020 ◽

Vol 231 (4) ◽

pp. 1435-1459 ◽

Author(s):

Dhaneshwar Mishra ◽

Sung Yoon ◽

Youjoung Seo ◽

Y. Eugene Pak

Keyword(s):

Thin Film ◽

Analytical Solutions ◽

Piezoelectric Sensors ◽

Sensors And Actuators ◽

Piezoelectric Sensors And Actuators ◽

Electroelastic Fields ◽

Piezoelectric Thin Film

Download Full-text