Low Temperature Heteroepitaxial Growth of a New Phase Lead Zirconate Titanate Film on Si Substrate with an Epitaxial (ZrO2)1-x(Y2O3)xBuffer Layer

2000 ◽  
Vol 39 (Part 1, No. 8) ◽  
pp. 4860-4868 ◽  
Author(s):  
Susumu Horita ◽  
Mami Aikawa ◽  
Tetsuya Naruse
Keyword(s):  
Low Temperature ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Heteroepitaxial Growth ◽  
Si Substrate ◽  
Phase Lead ◽  
Zirconate Titanate ◽  
New Phase

scholarly journals Low-Temperature Synthesis of Single-Phase Lead Zirconate Titanate Thin Film with a nm-Seeding Technique.

2002 ◽  
Vol 110 (1286) ◽  
pp. 911-915 ◽  
Author(s):  
Tomokazu TANASE ◽  
Ayako NISHIKATA ◽  
Yusuke IIZUKA ◽  
Yoshio KOBAYASHI ◽  
Mikio KONNO ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Lead Zirconate Titanate ◽  
Single Phase ◽  
Lead Zirconate ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Phase Lead ◽  
Zirconate Titanate ◽  
Titanate Thin Film

Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

2019 ◽  
Vol 239 ◽  
pp. 71-74 ◽  
Author(s):  
Tomoya Ohno ◽  
Kentaroh Fukumitsu ◽  
Takamasa Honda ◽  
Akinori Sakamoto ◽  
Sadaaki Tanaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Si Substrate ◽  
Zirconate Titanate
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