Perovskite phase lead zirconate titanate thin film deposition on Pt/SiO2/Si substrate at low temperature

1998 ◽  
Vol 29 (3) ◽  
pp. 907-909
Author(s):  
Chung Cheng Chang
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Lead Zirconate Titanate ◽  
Perovskite Phase ◽  
Thin Film Deposition ◽  
Lead Zirconate ◽  
Film Deposition ◽  
Si Substrate ◽  
Phase Lead ◽  
Titanate Thin Film

scholarly journals Low-Temperature Synthesis of Single-Phase Lead Zirconate Titanate Thin Film with a nm-Seeding Technique.

2002 ◽  
Vol 110 (1286) ◽  
pp. 911-915 ◽  
Author(s):  
Tomokazu TANASE ◽  
Ayako NISHIKATA ◽  
Yusuke IIZUKA ◽  
Yoshio KOBAYASHI ◽  
Mikio KONNO ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Lead Zirconate Titanate ◽  
Single Phase ◽  
Lead Zirconate ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Phase Lead ◽  
Zirconate Titanate ◽  
Titanate Thin Film

scholarly journals Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

2004 ◽  
Vol 19 (6) ◽  
pp. 1862-1868 ◽  
Author(s):  
Takeshi Morita ◽  
Yasuo Wagatsuma ◽  
Hitoshi Morioka ◽  
Hiroshi Funakubo ◽  
Nava Setter ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Thin Film Deposition ◽  
Lead Zirconate ◽  
Film Deposition ◽  
Dimensional Structure ◽  
Zirconate Titanate ◽  
Pzt Thin Film ◽  
Poling Direction

Deposition of thin films via hydrothermal method has various advantages: low deposition temperature, high purity, deposition on a three-dimensional structure,and a large thickness. Although an epitaxial lead zirconate titanate (PZT) thin-film deposition has been reported, the ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The current paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, a 200-nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin film was deposited on SrRuO3. The remanent polarization 2Pr and coercive electric field for PZT on SrRuO3/SrTiO3 (001) were 17.1 μC/cm2 and 36 kV/cm, respectively, and those of PZT on SrRuO3/SrTiO3 (111) were 32.7 μC/cm2 and 59 kV/cm, respectively. The reason for large imprint electrical field, 91 kV/cm and 40 kV/cm for each film, was unclear at this stage, although it is associated with self–alignment poling direction. This self–alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

scholarly journals Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

2003 ◽  
Vol 784 ◽  
Author(s):  
Takeshi Morita ◽  
Yasuo Wagatsuma ◽  
Yasuo Cho ◽  
Hitoshi Morioka ◽  
Hiroshi Funakubo ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Three Dimensional ◽  
Thin Film Deposition ◽  
Lead Zirconate ◽  
Film Deposition ◽  
Dimensional Structure ◽  
Pzt Thin Film ◽  
Poling Direction

ABSTRACTHydrothermal method has various advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure and a large thickness. Although epitaxial PZT thin film deposition has reported, ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The present paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, 200 nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin was deposited on SrRuO3. The remanent polarization 2Pr for PZT on SrRuO3/SrTiO3 (001) was 19.5 μC/cm2 and that of PZT on SrRuO3/SrTiO3 (111) was 37.2 μC/cm2 respectively. The self alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers

2006 ◽  
Vol 45 (11) ◽  
pp. 8795-8800 ◽  
Author(s):  
Jian Lu ◽  
Tsuyoshi Ikehara ◽  
Yi Zhang ◽  
Ryutaro Maeda ◽  
Takashi Mihara
Keyword(s):  
Thin Film ◽  
Energy Dissipation ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Titanate Thin Film

Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

2012 ◽  
Vol 9 (11-12) ◽  
pp. 1041-1073 ◽  
Author(s):  
Francoise Massines ◽  
Christian Sarra-Bournet ◽  
Fiorenza Fanelli ◽  
Nicolas Naudé ◽  
Nicolas Gherardi
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Plasma Technology
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