Enhancement of Photoluminescence and Electrical Properties of Ga-Doped ZnO Thin Film Grown on α-Al2O3(0001) Single-Crystal Substrate by rf Magnetron Sputtering through Rapid Thermal Annealing

2001 ◽  
Vol 40 (Part 2, No. 10A) ◽  
pp. L1040-L1043 ◽  
Author(s):  
Jung Cho ◽  
Jongbum Nah ◽  
Min-Seok Oh ◽  
Jae-Hoon Song ◽  
Ki-Hyun Yoon ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Single Crystal ◽  
Rf Magnetron Sputtering ◽  
Single Crystal Substrate ◽  
Zno Thin Film ◽  
Crystal Substrate ◽  
Doped Zno ◽  
Α Al2o3

Effect of growth temperature on the properties of Al-doped ZnO thin film prepared by RF magnetron sputtering

2010 ◽  
Author(s):  
Zhou Yang ◽  
Hongfang Zheng ◽  
Xiaohong Li ◽  
Yingcai Peng ◽  
Qingxun Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Growth Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Film ◽  
Doped Zno

scholarly journals Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method

2009 ◽  
Vol 18 (3) ◽  
pp. 213-220 ◽  
Author(s):  
Young-Soo No ◽  
Dong-Hee Park ◽  
Tae-Whan Kim ◽  
Ji-Won Choi ◽  
Won-Kook Choi
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Film ◽  
Doped Zno
Sign in / Sign up

Export Citation Format

Share Document