Gas Temperature Measurement in a Surface-Wave Argon Plasma Column at Low Pressures

2002 ◽  
Vol 41 (Part 1, No. 9) ◽  
pp. 5787-5791 ◽  
Author(s):  
A. Palmero ◽  
J. Cotrino ◽  
C. Lao ◽  
A. Barranco ◽  
A. R. González-Elipe
Keyword(s):  
Surface Wave ◽  
Temperature Measurement ◽  
Plasma Column ◽  
Argon Plasma ◽  
Gas Temperature ◽  
Low Pressures

Gas temperature equation in a high-frequency argon plasma column at low pressures

2002 ◽  
Vol 9 (1) ◽  
pp. 358-363 ◽  
Author(s):  
A. Palmero ◽  
J. Cotrino ◽  
A. Barranco ◽  
A. R. González-Elipe
Keyword(s):  
Plasma Column ◽  
High Frequency ◽  
Argon Plasma ◽  
Gas Temperature ◽  
Low Pressures ◽  
Temperature Equation

Electron temperature measurement in a surface-wave-produced argon plasma at intermediate pressures

2001 ◽  
Vol 14 (3) ◽  
pp. 361-366 ◽  
Author(s):  
C. Lao ◽  
J. Cotrino ◽  
A. Palmero ◽  
A. Gamero ◽  
A.R. González-Elipe
Keyword(s):  
Surface Wave ◽  
Electron Temperature ◽  
Temperature Measurement ◽  
Argon Plasma

Excitation Kinetic in an Argon Plasma Column Produced by a Surface Wave at Atmospheric Pressure

1996 ◽  
Vol 65 (4) ◽  
pp. 948-954 ◽  
Author(s):  
M. D. Calzada ◽  
A. Rodero ◽  
A. Sola ◽  
A. Gamero
Keyword(s):  
Surface Wave ◽  
Plasma Column ◽  
Atmospheric Pressure ◽  
Argon Plasma

Radial variation of excited atom densities in an argon plasma column produced by a microwave surface wave

1982 ◽  
Vol 60 (3) ◽  
pp. 379-382 ◽  
Author(s):  
M. Moisan ◽  
R. Pantel ◽  
A. Ricard
Keyword(s):  
Magnetic Field ◽  
Surface Wave ◽  
Plasma Column ◽  
Positive Column ◽  
Excited Atom ◽  
Axial Magnetic Field ◽  
Argon Plasma ◽  
Gas Pressure ◽  
Radial Variation ◽  
Radial Profiles

The radial variations of radiative and metastable atom densities in an argon plasma column produced by a microwave surface wave are obtained. A large variety of radial profiles is observed as a function of wave frequency (300–1000 MHz), gas pressure (50–200 mTorr), tube diameter (17.5–34 mm) and axial magnetic field. The results differ significantly from those reported for the dc positive column, where the radial distributions keep approximately the same J0 Bessel-like profile.

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