Bipolar Structure in Thermally Treated Czochralski Silicon Wafer

2003 ◽  
Vol 42 (Part 1, No. 3) ◽  
pp. 1129-1132 ◽  
Author(s):  
Xuegong Yu ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Ruixin Fan ◽  
Duanlin Que
Keyword(s):  
Silicon Wafer ◽  
Bipolar Structure ◽  
Czochralski Silicon ◽  
Thermally Treated

Bipolar structure of carrier concentration in hydrogen pre-annealing Czochralski silicon wafer

2003 ◽  
Vol 340-342 ◽  
pp. 601-604
Author(s):  
Xuegong Yu ◽  
Deren Yang ◽  
Ruixin Fan ◽  
Xiangyang Ma ◽  
Duanlin Que
Keyword(s):  
Carrier Concentration ◽  
Silicon Wafer ◽  
Bipolar Structure ◽  
Czochralski Silicon

Effect of nitrogen doping on denuded zone formed by rapid thermal process in Czochralski silicon wafer

2006 ◽  
Vol 376-377 ◽  
pp. 216-219 ◽  
Author(s):  
Can Cui ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Ruixin Fan ◽  
Liben Li ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Thermal Process ◽  
Nitrogen Doping ◽  
Rapid Thermal Process ◽  
Czochralski Silicon

Effect of annealing atmosphere on oxygen precipitation and formation of denuded zone in Czochralski silicon wafer

2006 ◽  
Vol 203 (10) ◽  
pp. 2370-2375 ◽  
Author(s):  
Can Cui ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Ruixin Fan ◽  
Duanlin Que
Keyword(s):  
Silicon Wafer ◽  
Annealing Atmosphere ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Hydrogen-related luminescence centres in thermally treated Czochralski silicon

1994 ◽  
Vol 9 (7) ◽  
pp. 1370-1374 ◽  
Author(s):  
E C Lightowlers ◽  
R C Newman ◽  
J H Tucker
Keyword(s):  
Czochralski Silicon ◽  
Thermally Treated
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