Postgrowth Irradiation of Hydrogenated Amorphous Carbon thin Films by Low-Energy Ion Beam

2004 ◽  
Vol 43 (4A) ◽  
pp. 1577-1580 ◽  
Author(s):  
Kie Moon Song ◽  
Soon Joon Rho ◽  
Han Jin Ahn ◽  
Kyung Chan Kim ◽  
Hong Koo Baik ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Ion Beam ◽  
Low Energy ◽  
Hydrogenated Amorphous Carbon ◽  
Carbon Thin Films ◽  
Hydrogenated Amorphous

scholarly journals Hydrogenated amorphous carbon thin films deposition by pulsed DC plasma enhanced by electrostatic confinement

2014 ◽  
Vol 258 ◽  
pp. 219-224 ◽  
Author(s):  
S.M.M. Dufrène ◽  
F. Cemin ◽  
M.R.F. Soares ◽  
C. Aguzzoli ◽  
M.E.H. Maia da Costa ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Dc Plasma ◽  
Hydrogenated Amorphous Carbon ◽  
Pulsed Dc ◽  
Electrostatic Confinement ◽  
Carbon Thin Films ◽  
Hydrogenated Amorphous
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