Plasma Parameters for Fast Deposition of Highly Crystallized Microcrystalline Silicon Films Using High-Density Microwave Plasma
2006 ◽
Vol 45
(2A)
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pp. 666-673
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Keyword(s):
2004 ◽
Vol 43
(12)
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pp. 7960-7965
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Keyword(s):
2002 ◽
Vol 74
(1-4)
◽
pp. 505-511
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Keyword(s):
2009 ◽
Vol 93
(6-7)
◽
pp. 812-815
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2001 ◽
Vol 40
(Part 2, No. 7A)
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pp. L701-L704
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2007 ◽
Vol 46
(No. 28)
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pp. L696-L698
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Keyword(s):
2006 ◽
Vol 33
(3)
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pp. 153-159
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2003 ◽
Vol 93
◽
pp. 109-114
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Keyword(s):