Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films

2007 ◽  
Vol 46 (10A) ◽  
pp. 6719-6726 ◽  
Author(s):  
Maw-Shung Lee ◽  
Sean Wu ◽  
Zhi-Xun Lin ◽  
Ruyen Ro
Keyword(s):  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Bulk Acoustic Wave ◽  
Wave Analysis ◽  
Crystalline Plane

Bulk acoustic wave analysis of crystalline plane oriented ZnO films

2007 ◽  
Vol 102 (8) ◽  
pp. 084908 ◽  
Author(s):  
Sean Wu ◽  
Zhi-Xun Lin ◽  
Maw-Shung Lee ◽  
Ruyen Ro
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Zno Films ◽  
Wave Analysis ◽  
Crystalline Plane

Piezoelectric Properties of Aluminum Nitride for Thin Film Bulk Acoustic Wave Resonator

2005 ◽  
Vol 47 (92) ◽  
pp. 309 ◽  
Author(s):  
Nam Kuangwoo ◽  
Park Yunkwon ◽  
Ha Byeoungju ◽  
Shim Dongha ◽  
Song Insang ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Piezoelectric Properties ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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