Bulk Acoustic Wave Analysis of Crystalline-Plane-Oriented Aluminum Nitride Films
2007 ◽
Vol 46
(10A)
◽
pp. 6719-6726
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2005 ◽
Vol 47
(92)
◽
pp. 309
◽
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2004 ◽
Vol 116
(4)
◽
pp. 2544-2544
Keyword(s):
Keyword(s):