Development of film bulk acoustic wave resonators based on piezoelectric aluminum nitride
2004 ◽
Vol 116
(4)
◽
pp. 2544-2544
Keyword(s):
2012 ◽
2009 ◽
Vol 56
(8)
◽
pp. 1731-1744
◽
Keyword(s):
2010 ◽
Vol 157
(12)
◽
pp. J419
◽
Keyword(s):
Keyword(s):
Keyword(s):