Crystallinity Evaluation by Microwave Photoconductivity Decay in Double-Layered Polycrystalline Silicon Thin Films Crystallized by Solid Green Laser Annealing

2007 ◽  
Vol 46 (12) ◽  
pp. 7607-7611 ◽  
Author(s):  
Yuta Sugawara ◽  
Yukiharu Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films ◽  
Photoconductivity Decay

Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing

2007 ◽  
Vol 46 (No. 8) ◽  
pp. L164-L166 ◽  
Author(s):  
Yuta Sugawara ◽  
Yukiharu Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films

Study on dopant activation of phosphorous implanted polycrystalline silicon thin films by KrF excimer laser annealing

2002 ◽  
Vol 46 (8) ◽  
pp. 1085-1090 ◽  
Author(s):  
Chang-Ho Tseng ◽  
Ching-Wei Lin ◽  
Teh-Hung Teng ◽  
Ting-Kuo Chang ◽  
Huang-Chung Cheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Dopant Activation ◽  
Silicon Thin Films ◽  
Krf Excimer Laser

Polycrystalline silicon thin films crystallized by green laser

2008 ◽  
Author(s):  
Zhijun Yuan ◽  
Qihong Lou ◽  
Jun Zhou ◽  
Xia Liu ◽  
Wei Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Green Laser ◽  
Silicon Thin Films

Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing for High-Performance Thin-Film Transistors

2007 ◽  
Vol 28 (5) ◽  
pp. 395-397 ◽  
Author(s):  
Yuta Sugawara ◽  
Yukiharu Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thin Film Transistors ◽  
High Performance ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films

Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors

2019 ◽  
Vol 3 (8) ◽  
pp. 173-178
Author(s):  
Yuta Sugawara ◽  
Y. Uraoka ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Green Laser ◽  
Silicon Thin Films ◽  
Si Thin Film
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