Effects of Rate Constant for Deprotection on Latent Image Formation in Chemically Amplified Extreme Ultraviolet Resists

2008 ◽  
Vol 47 (6) ◽  
pp. 4926-4931 ◽  
Author(s):  
Takahiro Kozawa ◽  
Seiichi Tagawa ◽  
Julius Joseph Santillan ◽  
Minoru Toriumi ◽  
Toshiro Itani
Keyword(s):  
Rate Constant ◽  
Extreme Ultraviolet ◽  
Image Formation ◽  
Latent Image ◽  
Chemically Amplified

Product Volatilization as a Probe of the Physics and Chemistry of Latent Image Formation in Chemically Amplified Resists†,‡

2002 ◽  
Vol 106 (42) ◽  
pp. 9776-9787 ◽  
Author(s):  
W. D. Hinsberg ◽  
F. A. Houle ◽  
G. M. Poliskie ◽  
D. Pearson ◽  
M. I. Sanchez ◽  
...  
Keyword(s):  
Image Formation ◽  
Latent Image ◽  
Chemically Amplified ◽  
Chemically Amplified Resists
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