Surface Smoothing Effect of an Amorphous Thin Film Deposited by Chemical Vapor Deposition or Atomic Layer Deposition
2019 ◽
Vol 16
(12)
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pp. 1900127
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2017 ◽
Vol 6
(8)
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pp. N111-N116
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Keyword(s):
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2014 ◽
Vol 131
(24)
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pp. n/a-n/a
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2003 ◽
Vol 21
(5)
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pp. S88-S95
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2016 ◽
Vol 34
(3)
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pp. 892-897
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2020 ◽
Vol 13
(7)
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pp. 1997-2023
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2019 ◽
Vol 37
(6)
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pp. 060903
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