Micromechanical Resonators for Ultrasound-Based Sensors

2021 ◽  
Vol MA2021-01 (59) ◽  
pp. 1593-1593
Author(s):  
Navid Farhoudi ◽  
Lars B Laurentius ◽  
Jules Magda ◽  
Christopher F Reiche ◽  
Florian Solzbacher
Keyword(s):  
Micromechanical Resonators

scholarly journals Single-electron detection utilizing coupled nonlinear microresonators

2020 ◽  
Vol 6 (1) ◽  
Author(s):  
Xuefeng Wang ◽  
Xueyong Wei ◽  
Dong Pu ◽  
Ronghua Huan
Keyword(s):  
Scientific Community ◽  
Room Temperature ◽  
Detection Method ◽  
Single Electron ◽  
Nonlinear Coupling ◽  
Electron Charge ◽  
Micromechanical Resonators ◽  
Charge Detection ◽  
Simple Strategy ◽  
Electron Detection

Abstract Since the discovery of the electron, the accurate detection of electrical charges has been a dream of the scientific community. Owing to some remarkable advantages, micro/nanoelectromechanical system-based resonators have been used to design electrometers with excellent sensitivity and resolution. Here, we demonstrate a novel ultrasensitive charge detection method utilizing nonlinear coupling in two micromechanical resonators. We achieve single-electron charge detection with a high resolution up to 0.197 ± 0.056 $${\mathrm{e}}/\sqrt {{\mathrm{Hz}}}$$ e / Hz at room temperature. Our findings provide a simple strategy for measuring electron charges with extreme accuracy.

Thermoelastic damping in GaAs micromechanical resonators

2008 ◽  
Vol 5 (9) ◽  
pp. 2920-2922 ◽  
Author(s):  
Hajime Okamoto ◽  
Daisuke Ito ◽  
Koji Onomitsu ◽  
Hiroshi Yamaguchi
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators

2003 ◽  
Vol 103 (1-2) ◽  
pp. 150-155 ◽  
Author(s):  
D. Lange ◽  
C. Hagleitner ◽  
C Herzog ◽  
O. Brand ◽  
H. Baltes
Keyword(s):  
Electromagnetic Actuation ◽  
Micromechanical Resonators ◽  
Mos Transistor

Resolution improvement in electromagnetically actuated Wheatstone bridge configuration micromechanical resonators

2018 ◽  
Vol 284 ◽  
pp. 181-185 ◽  
Author(s):  
Magdalena Moczała ◽  
Andrzej Sierakowski ◽  
Michał Babij ◽  
Krzysztof Kwoka ◽  
Rafał Dobrowolski ◽  
...  
Keyword(s):  
Wheatstone Bridge ◽  
Micromechanical Resonators ◽  
Resolution Improvement ◽  
Electromagnetically Actuated

Electrostatic charge and field sensors based on micromechanical resonators

2003 ◽  
Vol 12 (5) ◽  
pp. 577-589 ◽  
Author(s):  
P.S. Riehl ◽  
K.L. Scott ◽  
R.S. Muller ◽  
R.T. Howe ◽  
J.A. Yasaitis
Keyword(s):  
Electrostatic Charge ◽  
Micromechanical Resonators
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