Influence of Oxygen Gas Ratio on the Properties of Aluminum-Doped Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputtering

2016 ◽  
Vol 16 (5) ◽  
pp. 5138-5142
Author(s):  
Minha Kim ◽  
Yong-Jun Jang ◽  
Ho-Sung Jung ◽  
Woochang Song ◽  
Hyunil Kang ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Aluminum Doped Zinc Oxide ◽  
Oxygen Gas ◽  
Gas Ratio

scholarly journals Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 073709 ◽  
Author(s):  
J. C. Fan ◽  
C. Y. Zhu ◽  
S. Fung ◽  
Y. C. Zhong ◽  
K. S. Wong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
P Type
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