Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering

1997 ◽  
Vol 81 (12) ◽  
pp. 7764-7772 ◽  
Author(s):  
Kun Ho Kim ◽  
Ki Cheol Park ◽  
Dae Young Ma
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical And Optical Properties ◽  
Zinc Oxide Films ◽  
Aluminum Doped Zinc Oxide

scholarly journals Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 073709 ◽  
Author(s):  
J. C. Fan ◽  
C. Y. Zhu ◽  
S. Fung ◽  
Y. C. Zhong ◽  
K. S. Wong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
P Type
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