In this work, the self-assembled monolayers of γ-aminopropyltrimethoxysilane and
octadecyltrichlorosilane were prepared on titanium films, radiated and solidified by ultraviolet
radiation/ozone photochemical process. The characterization and friction properties of titanium film,
APS SAMs, OTS SAMs and the radiated APS SAMs, OTS SAMs were explored by atomic force
microscopy and friction force microscopy. The effects of functional groups, sliding velocity, load and
ultraviolet radiation/ozone photochemical process on friction properties of SAMs were analyzed. The
experimental results show that the titanium film coated with SAMs, especially under ultraviolet
radiation/ozone, is exhibited with a good friction property. The friction property of APS SAMs is
better than OTS SAMs under or no ultraviolet radiation/ozone. The friction force increases with the
increasing of sliding velocity and decreases with the increasing of load.
