A Study on Error Compensation on High Precision Machine Tool System Using a 2D Laser Holographic Scale System
2012 ◽
Vol 6
(6)
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pp. 999-1014
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2010 ◽
Vol 24
(15n16)
◽
pp. 2484-2489
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Keyword(s):
2011 ◽
Vol 2011.6
(0)
◽
pp. _3239-1_-_3239-6_
Keyword(s):
2008 ◽
Vol 381-382
◽
pp. 187-190
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2013 ◽
Vol 26
(1)
◽
pp. 158-165
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2021 ◽
Vol 15
(4)
◽
pp. JAMDSM0048-JAMDSM0048
Keyword(s):
2012 ◽
Vol 201-202
◽
pp. 157-161
Keyword(s):
2015 ◽
Vol 81
(1-4)
◽
pp. 73-85
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Keyword(s):
2005 ◽
Vol 45
(9)
◽
pp. 1085-1094
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