Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source

Confocal probes have been widely adopted in various industries owing to their depth-sectioning effects. A dual-detector differential chromatic confocal probe using a mode-locked femtosecond laser source is proposed herein, and the measurement range expansion of the probe using a supercontinuum light source is discussed. Supercontinuum light has an extremely wide spectrum. A simulation based on wave optics is performed to evaluate the detection sensitivity and measurable range by considering the chromatic aberration of the lens materials. Additionally, an experimental setup is constructed using a supercontinuum light source, and its feasibility is validated. A measurable range of 200 μm is adopted in the experiment, and three-dimensional surface profile measurements are performed. However, the developed confocal probe has not been used for surface topography measurements. Experiments are conducted to verify the performance of the developed probe.

An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe

This paper presents an off-axis differential method for the improvement of a femtosecond laser differential chromatic confocal probe having a dual-detector configuration. In the proposed off-axis differential method employing a pair of single-mode fiber detectors, a major modification is made to the conventional differential setup in such a way that the fiber detector in the reference detector is located at the focal plane of a collecting lens but with a certain amount of off-axis detector shift, while the fiber detector in the measurement detector is located on the rear focal plane without the off-axis detector shift; this setup is different from the conventional one where the difference between the two confocal detectors is provided by giving a defocus to one of the fiber detectors. The newly proposed off-axis differential method enables the differential chromatic confocal setup to obtain the normalized chromatic confocal output with a better signal-to-noise ratio and approaches a Z-directional measurement range of approximately 46 μm, as well as a measurement resolution of 20 nm, while simplifying the optical alignments in the differential chromatic confocal setup, as well as the signal processing through eliminating the complicated arithmetic operations in the determination of the peak wavelength. Numerical calculations based on a theoretical equation and experiments are carried out to verify the feasibility of the proposed off-axis differential method for the differential chromatic confocal probe with a mode-locked femtosecond laser source.

Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe

Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 μm Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.

Investigation and Improvement of Thermal Stability of a Chromatic Confocal Probe with a Mode-Locked Femtosecond Laser Source

An intentional investigation on the thermal stability of a mode-locked femtosecond laser chromatic confocal probe, which is a critical issue for the probe to be applied for long-term displacement measurement or surface profile measurement requiring long-time scanning, is carried out. At first, the thermal instability of the first prototype measurement setup is evaluated in experiments where the existence of a considerably large thermal instability is confirmed. Then the possible reasons for the thermal instability of the measurement setup are analyzed quantitatively, such as the thermal instability of the refractive index of the confocal lens and the thermal expansion of mechanical jigs employed in the probe. It is verified that most of the thermal instability of the measurement setup is caused by the thermal expansion of mechanical jigs in the probe. For the improvement of the thermal stability of the probe, it is necessary to employ a low thermal expansion material for the mechanical jigs in the measurement setup and to shorten the optical path length of the laser beam. Based on the analysis result, a second prototype probe is newly designed and constructed. The improved thermal stability of the second prototype probe is verified through theoretical calculations and experiments.

A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe

A method is proposed to expand the Z-directional measurement range of a fiber-based dual-detector chromatic confocal probe with a mode-locked femtosecond laser source. In the dual-detector chromatic confocal probe, the Z-directional displacement of a measurement target is derived from the peak wavelength in the normalized intensity ratio from the two light intensities obtained by the two identical fiber detectors. In this paper, a new method utilizing the main-lobe and side-lobes of axial responses acquired from both the normalized intensity ratio Ia and the invert normalized intensity ratio In, which is the inverse of Ia, is proposed to obtain the seamless relationship between the peak wavelength and the Z-directional displacement of a measurement target. Theoretical calculations and experimental investigation are carried out to demonstrate the feasibility of the proposed measurement range expansion method.